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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 25 — Sep. 1, 2010
  • pp: 4767–4773

Resonant soft x-ray reflectivity of Me / B 4 C multilayers near the boron K edge

Dmitriy Ksenzov, Christoph Schlemper, and Ullrich Pietsch  »View Author Affiliations

Applied Optics, Vol. 49, Issue 25, pp. 4767-4773 (2010)

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Energy dependence of the optical constants of boron carbide in the short period Ru / B 4 C and Mo / B 4 C multilayers (MLs) are evaluated from complete reflectivity scans across the boron K edge using the energy-resolved photon-in–photon-out method. Differences between the refractive indices of the B 4 C material inside and close to the surface are obtained from the peak profile of the first order ML Bragg peak and the reflection profile near the critical angle of total external reflection close to the surface. Where a Mo / B 4 C ML with narrow barrier layers appears as a homogeneous ML at all energies, a Ru / B 4 C ML exhibits another chemical nature of boron at the surface compared to the bulk. From evaluation of the critical angle of total external reflection in the energy range between 184 and 186 eV , we found an enriched concentration of metallic boron inside the Ru-rich layer at the surface, which is not visible in other energy ranges.

© 2010 Optical Society of America

OCIS Codes
(230.4170) Optical devices : Multilayers
(290.3030) Scattering : Index measurements
(260.6048) Physical optics : Soft x-rays

ToC Category:
Physical Optics

Original Manuscript: May 27, 2010
Revised Manuscript: July 20, 2010
Manuscript Accepted: July 23, 2010
Published: August 26, 2010

Dmitriy Ksenzov, Christoph Schlemper, and Ullrich Pietsch, "Resonant soft x-ray reflectivity of Me/B4C multilayers near the boron K edge," Appl. Opt. 49, 4767-4773 (2010)

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