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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 3 — Jan. 20, 2010
  • pp: 505–512

Scattered light measurements on textured crystalline silicon substrates using an angle-resolved Mueller matrix polarimeter

Martin Foldyna, Mario Moreno, Pere Roca i Cabarrocas, and Antonello De Martino  »View Author Affiliations


Applied Optics, Vol. 49, Issue 3, pp. 505-512 (2010)
http://dx.doi.org/10.1364/AO.49.000505


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Abstract

Dry plasma etching is a promising technique for crystalline silicon surface texturing aimed at improving solar cell efficiencies by reducing incident light reflection and backscattering at the cell front surface. In this work we present a new optical characterization technique for textured surfaces based on a Mueller polarimeter coupled with a high numerical aperture microscope operated either in real or in angular spaces. This tool provides both the specularly reflected and the angle-resolved backscattered intensities in a very efficient manner, due to the absence of moving parts. Three different silicon samples were etched in a standard reactor with SF 6 / O 2 plasmas at various RF powers, resulting in different textures that were characterized by scanning electron microscopy, standard reflectometry, and by our tool. The three techniques yielded consistent results. However, reflectometry could not take into account the backscattered light from highly textured surfaces, leading to significant underestimation of the overall amount of the reflected light. In contrast, our tool has demonstrated the potential to measure both reflected and backscattered light quickly and efficiently for all samples, paving the way for a new characterization technique for textured solar cells both at the development and at the production stage.

© 2010 Optical Society of America

OCIS Codes
(040.5350) Detectors : Photovoltaic
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(240.6700) Optics at surfaces : Surfaces
(290.5820) Scattering : Scattering measurements
(240.3695) Optics at surfaces : Linear and nonlinear light scattering from surfaces

ToC Category:
Scattering

History
Original Manuscript: September 18, 2009
Revised Manuscript: December 15, 2009
Manuscript Accepted: December 21, 2009
Published: January 19, 2010

Citation
Martin Foldyna, Mario Moreno, Pere Roca i Cabarrocas, and Antonello De Martino, "Scattered light measurements on textured crystalline silicon substrates using an angle-resolved Mueller matrix polarimeter," Appl. Opt. 49, 505-512 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-3-505

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