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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 31 — Nov. 1, 2010
  • pp: 6014–6023

Calibration of spherical reference surfaces for Fizeau interferometry: a comparative study of methods

Jan Burke and David S. Wu  »View Author Affiliations


Applied Optics, Vol. 49, Issue 31, pp. 6014-6023 (2010)
http://dx.doi.org/10.1364/AO.49.006014


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Abstract

We present an experimental study of three calibration methods for spherical reference surfaces in Fizeau interferometry. The ball average, which relies on averaging measurements of a test ball surface over sufficiently many random rotations of the ball, is theoretically an absolute technique but can be very laborious. On the other hand, a recently introduced double-pass technique, comparing the two halves of the reference surface, is able to determine the point-symmetric contribution in as few as three measurements but does not detect the point-antisymmetric portion. Finally, the point-symmetric errors of the reference surface can be captured in a single, so-called “cat’s-eye” measurement. Our study tries to answer the question of which of the techniques is preferable in practice. We find that the answer depends on the required uncertainty, and it appears that the new double-pass technique represents a practical and reasonable trade-off between expediency and accuracy.

© 2010 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(220.4840) Optical design and fabrication : Testing

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 3, 2010
Revised Manuscript: July 27, 2010
Manuscript Accepted: September 22, 2010
Published: October 26, 2010

Citation
Jan Burke and David S. Wu, "Calibration of spherical reference surfaces for Fizeau interferometry: a comparative study of methods," Appl. Opt. 49, 6014-6023 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-31-6014


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References

  1. H. Schreiber and J. Bruning, “Phase shifting interferometry,” in Optical Shop Testing, D.Malacara, ed. (Wiley, 2007), pp. 547–666. [CrossRef]
  2. A. Jensen, “Absolute calibration method for laser Twyman-Green wave-front testing interferometers,” J. Opt. Soc. Am.63, 1313 (1973) (abstract only).JOSAAH0030-3941 [PubMed]
  3. G. Schulz and J. Schwider, “Interferometric testing of smooth surfaces,” in Progress in Optics, E.Wolf, ed. (North Holland, 1976), Vol.  13, pp. 128–129. [CrossRef]
  4. K. E. Elssner, R. Burow, J. Grzanna, and R. Spolaczyk, “Absolute sphericity measurement,” Appl. Opt. 28, 4649–4661(1989). [CrossRef] [PubMed]
  5. B. Truax, “Absolute interferometric testing of spherical surfaces,” Proc. SPIE 1400, 61–68 (1990).
  6. K. Creath and J. Wyant, “Testing spherical surfaces: a fast, quasi-absolute technique,” Appl. Opt. 31, 4350–4354 (1992). [CrossRef] [PubMed]
  7. R. Schreiner, J. Schwider, N. Lindlein, and K. Mantel, “Absolute testing of the reference surface of a Fizeau interferometer through even/odd decompositions,” Appl. Opt. 47, 6134–6141(2008). [CrossRef] [PubMed]
  8. J. Burke, “Rapid and reliable reference sphere calibration for Fizeau interferometry,” Opt. Lett. 33, 2536–2538(2008). [CrossRef] [PubMed]
  9. M. Sjödahl and B. Oreb, “Stitching interferometric measurement data for inspection of large optical components,” Opt. Eng. 41, 403–408 (2002). [CrossRef]
  10. R. Parks, C. Evans, and L. Shao, Calibration of Interferometer Transmission Spheres, Vol.  12 of OSA Technical Digest Series (Optical Society of America, 1998), pp. 80–83.
  11. U. Griesmann, Q. Wang, J. Soons, and R. Carakos, “A simple ball averager for reference sphere calibrations,” Proc. SPIE 5869, 58690S (2005). [CrossRef]
  12. N. Gardner and A. Davies, “Self-calibration for microrefractive lens measurements,” Opt. Eng. 45, 033603 (2006). [CrossRef]
  13. J. Burke, K. Green, W. Stuart, E. Puhanic, A. Leistner, and B. Oreb, “Fabrication and testing of a high-precision concave spherical mirror,” Proc. SPIE 7064, 70640E (2008). [CrossRef]
  14. P. Zhou and J. Burge, “Limits for interferometer calibration using the random ball test,” Proc. SPIE 7426, 74260U (2009). [CrossRef]
  15. Optical Perspectives LLC, http://www.optiper.com.
  16. K. Creath and J. Wyant, “Absolute measurement of surface roughness,” Appl. Opt. 29, 3823–3827 (1990). [CrossRef] [PubMed]
  17. J. Burke, K. Wang, and A. Bramble, “Testing of an off-axis parabolic mirror. I. Configuration with spherical reference wave and flat return mirror,” Opt. Express 17, 3196–3210(2009). [CrossRef] [PubMed]

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