In this work, we have developed a different algorithm than the classical one on phase-shifting interferometry. These algorithms typically use constant or homogeneous phase displacements and they can be quite accurate and insensitive to detuning, taking appropriate weight factors in the formula to recover the wrapped phase. However, these algorithms have not been considered with variable or inhomogeneous displacements. We have generalized these formulas and obtained some expressions for an implementation with variable displacements and ways to get partially insensitive algorithms with respect to these arbitrary error shifts.
© 2010 Optical Society of America
Instrumentation, Measurement, and Metrology
Original Manuscript: July 28, 2010
Revised Manuscript: September 29, 2010
Manuscript Accepted: October 1, 2010
Published: November 3, 2010
Alejandro Téllez-Quiñones and Daniel Malacara-Doblado, "Inhomogeneous phase shifting: an algorithm for nonconstant phase displacements," Appl. Opt. 49, 6224-6231 (2010)