Two-spherical-wave ultraviolet interferometer for making an antireflective subwavelength periodic pattern on a curved surface
Applied Optics, Vol. 49, Issue 32, pp. 6268-6275 (2010)
http://dx.doi.org/10.1364/AO.49.006268
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Abstract
An ultraviolet two-spherical-wave interferometer was developed in order to make a
subwavelength structured surface on a curved surface. The change in fringe period on
the curved surface was significantly suppressed compared with the two-plane-wave
interferometer. The optical setup method for suppressing the change in fringe period
is described. The effect of the two-spherical-wave interferometer was investigated
by numerical simulations. In an experimental demonstration for a concave spherical
surface with
© 2010 Optical Society of America
OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(230.4000) Optical devices : Microstructure fabrication
(310.1210) Thin films : Antireflection coatings
(050.6624) Diffraction and gratings : Subwavelength structures
(310.6628) Thin films : Subwavelength structures, nanostructures
(240.3990) Optics at surfaces : Micro-optical devices
ToC Category:
Optical Devices
History
Original Manuscript: August 5, 2010
Revised Manuscript: October 1, 2010
Manuscript Accepted: October 1, 2010
Published: November 4, 2010
Citation
Akio Mizutani, Shumpei Takahira, and Hisao Kikuta, "Two-spherical-wave ultraviolet interferometer for making an antireflective subwavelength periodic pattern on a curved surface," Appl. Opt. 49, 6268-6275 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-32-6268
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