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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 34 — Dec. 1, 2010
  • pp: 6563–6569

Universal calculation formula and calibration method in Fourier transform profilometry

Yongfu Wen, Sikun Li, Haobo Cheng, Xianyu Su, and Qican Zhang  »View Author Affiliations


Applied Optics, Vol. 49, Issue 34, pp. 6563-6569 (2010)
http://dx.doi.org/10.1364/AO.49.006563


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Abstract

We propose a universal calculation formula of Fourier transform profilometry and give a strict theoretical analysis about the phase–height mapping relation. As the request on the experimental setup of the universal calculation formula is unconfined, the projector and the camera can be located arbitrarily to get better fringe information, which makes the operation flexible. The phase–height calibration method under the universal condition is proposed, which can avoid measuring the system parameters directly. It makes the system easy to manipulate and improves the measurement velocity. A computer simulation and experiment are conducted to verify its validity. The calculation formula and calibration method have been applied to measure an object of 22.00 mm maximal height. The relative error of the measurement result is only 0.59%. The experimental results prove that the three-dimensional shape of tested objects can be reconstructed exactly by using the calculation formula and calibration method, and the system has better universality.

© 2010 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 17, 2010
Revised Manuscript: September 19, 2010
Manuscript Accepted: October 5, 2010
Published: November 22, 2010

Citation
Yongfu Wen, Sikun Li, Haobo Cheng, Xianyu Su, and Qican Zhang, "Universal calculation formula and calibration method in Fourier transform profilometry," Appl. Opt. 49, 6563-6569 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-34-6563

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