OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 34 — Dec. 1, 2010
  • pp: 6630–6636

Ion beam figuring of high-slope surfaces based on figure error compensation algorithm

Yifan Dai, Wenlin Liao, Lin Zhou, Shanyong Chen, and Xuhui Xie  »View Author Affiliations


Applied Optics, Vol. 49, Issue 34, pp. 6630-6636 (2010)
http://dx.doi.org/10.1364/AO.49.006630


View Full Text Article

Enhanced HTML    Acrobat PDF (1042 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

In a deterministic figuring process, it is critical to guarantee high stability of the removal function as well as the accuracy of the dwell time solution, which directly influence the convergence of the figuring process. Hence, when figuring steep optics, the ion beam is required to keep a perpendicular incidence, and a five-axis figuring machine is typically utilized. In this paper, however, a method for high-precision figuring of high-slope optics is proposed with a linear three-axis machine, allowing for inclined beam incidence. First, the changing rule of the removal function and the normal removal rate with the incidence angle is analyzed according to the removal characteristics of ion beam figuring (IBF). Then, we propose to reduce the influence of varying removal function and projection distortion on the dwell time solution by means of figure error compensation. Consequently, the incident ion beam is allowed to keep parallel to the optical axis. Simulations and experiments are given to verify the removal analysis. Finally, a figuring experiment is conducted on a linear three-axis IBF machine, which proves the validity of the method for high-slope surfaces. It takes two iterations and about 9 min to successfully figure a fused silica sample, whose aperture is 21.3 mm and radius of curvature is 16 mm. The root-mean-square figure error of the convex surface is reduced from 13.13 to 5.86 nm.

© 2010 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: August 19, 2010
Revised Manuscript: October 6, 2010
Manuscript Accepted: October 15, 2010
Published: November 30, 2010

Citation
Yifan Dai, Wenlin Liao, Lin Zhou, Shanyong Chen, and Xuhui Xie, "Ion beam figuring of high-slope surfaces based on figure error compensation algorithm," Appl. Opt. 49, 6630-6636 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-34-6630

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited