OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 35 — Dec. 10, 2010
  • pp: 6697–6702

Manipulation and observation of Ag photodoping patterns in GeS 2 amorphous films by a dual functional laser scanning microfabrication/microscope system

Yoshikazu Kanai, Yoshihisa Murakami, and Moriaki Wakaki  »View Author Affiliations


Applied Optics, Vol. 49, Issue 35, pp. 6697-6702 (2010)
http://dx.doi.org/10.1364/AO.49.006697


View Full Text Article

Enhanced HTML    Acrobat PDF (586 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The photodoping phenomenon of Ag is one of the light-induced phenomena in GeS 2 amorphous chalcogenide films. It has potential as a process for fabricating photonic structures, such as waveguides and micro-optics, but its fabrication method is still under research. A dual functional laser scanning system integrating microfabrication and microscope systems was developed. In situ nanoscale fabrication by a UV laser effective for photodoping, and observation by a VIS wavelength laser, which does not affect the material, were demonstrated under same setup in one system. Several fine doped patterns were fabricated and the optical performances were evaluated. These results give the feasibility of forming various photonic structures.

© 2010 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(180.5810) Microscopy : Scanning microscopy
(230.3990) Optical devices : Micro-optical devices
(160.5335) Materials : Photosensitive materials
(310.6845) Thin films : Thin film devices and applications

ToC Category:
Thin Films

History
Original Manuscript: September 8, 2010
Revised Manuscript: October 29, 2010
Manuscript Accepted: October 29, 2010
Published: December 1, 2010

Citation
Yoshikazu Kanai, Yoshihisa Murakami, and Moriaki Wakaki, "Manipulation and observation of Ag photodoping patterns in GeS2 amorphous films by a dual functional laser scanning microfabrication/microscope system," Appl. Opt. 49, 6697-6702 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-35-6697


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. M. T. Kostyshin, E. V. Mikhailovskaya, and P. F. Romanenko, “Photographic sensitivity Effect in thin semiconducting films on metal substrates,” Sov. Phys. Solid State 8, 451–452 (1966).
  2. A. V. Kolobov and S. R. Elliott, “Photodoping of amorphous chalcogenides by metals,” Adv. Phys. 40, 625–684 (1991). [CrossRef]
  3. H. Sakuma, I. Shimizu, H. Kokada, and E. Inoue, “A new method for producing low-electrical-resistivity patterns in insulating chalcogenide glasses,” Bull. Chem. Soc. Jpn. 44, 1723 (1971). [CrossRef]
  4. J. Dersner and G. B. Stringfellow, “Electronic processes in the photo-crystallization of vitreous selenium,” J. Phys. Chem. Solids 29, 303–311 (1968). [CrossRef]
  5. L. Shimizu, H. Sakuma, H. Kokoda, and E. Inoue, “The photo-doping of metals into solids for new-type imaging systems,” Bull. Chem. Soc. Jpn. 44, 1173 (1971). [CrossRef]
  6. T. Wagner, M. Frumar, and L. Benes, “Photoenhanced dissolution and diffusion of Ag in As2Sx layers,” J. Non-Cryst. Solids 90, 517–520 (1987). [CrossRef]
  7. J. S. Berkes, S. W. Ing, Jr., and W. J. Hillegas, “Photodecomposition of amorphous As2Se3 and As2S3,” J. Appl. Phys. 42, 4908–4916 (1971). [CrossRef]
  8. K. Tanaka, M. Kikuchi, and H. Mizuno, “Kinetics of photo-induced edge shift in optical transmission of amorphous As2S3 film,” Solid State Commun. 12, 195–198 (1973). [CrossRef]
  9. J. Lee, T. Ogawa, H. Kudo, and T. Arai, “Volume expansion and Ag doping amounts in the photodoping process in amorphous As2S3,” Jpn. J. Appl. Phys. 33, 5865–5869 (1994). [CrossRef]
  10. Y. Murakami, T. Ogawa, M. Wakaki, and S. Kawabata, “In-situ ellipsometric observations of thickness change in the layers of Ag/a-AS2S3 film system with progression of photodoping,” Jpn. J. Appl. Phys. 39, 509–510 (2000). [CrossRef]
  11. H. Ashley and G. T. Sincerbox, “Holographic data storage,” IBM J. Res. Dev. 44, 341–368 (2000). [CrossRef]
  12. L. Y. Ju, K. H. Nam, H. Choi, and H. B. Chung, “Developing recordable medium with amorphous chalcogenide material for HDDS,” IEICE Technical Report ED2007-95, SDM2007-100 (2007), pp. 197–200.
  13. P. Davidovits and A. M. D. Egger, “Scanning laser microscope for biological investigations,” Appl. Opt. 10, 1615–1619 (1971). [CrossRef] [PubMed]
  14. T. Wilson and C. R. J. Sheppard, Theory and Practice of Scanning Optical Microscopy (Academic, 1984).
  15. Y. Kanai, Y. Kanzaki, M. Wakaki, and N. Takeyama, “Design and development of multi functional confocal laser scanning microscope with UV/VIS laser source,” Proc. SPIE 5878, 58781D (2005). [CrossRef]
  16. Y. Kanai, Y. Kanzaki, and M. Wakaki, “Development of multi functional confocal laser scanning microscope with UV/VIS laser source,” Proc. School Eng. Tokai University 46 (2), 23–28 (2006).
  17. T. Wagner, M. Frumar, and V. Suskova, “Photoenhanced dissolution and lateral diffusion of Ag in amorphous As-S layers,” J. Non-Cryst. Solids 128197–207 (1991). [CrossRef]
  18. I. Shimizu, H. Sakuma, H. Kokado, and E. Inoue, “Metal-chalcogenides systems as imaging materials,” Photogr. Soc. Eng. 16, 291–295 (1972).
  19. A. Yoshikawa, O. Ochi, H. Nagai, and Y. Mizushima, “Dry development of Se‐Ge inorganic photoresist,” Appl. Phys. Lett. 36, 107–109 (1980). [CrossRef]
  20. Y. Murakami, Y. Sata, and M. Wakaki, “Research of Ag photodoping phenomenon in GeS2 chalcogenide glass film,” Proc. School Eng. Tokai University 48, 33–40 (2008).
  21. Y. Murakami, M. Wakaki, and S. Kawabata, “In-situ observation of photodoping phenomena in chalcogenide glass by spectroscopic ellipsometry,” Phys. Stat. Sol. C 5, 1283–1286(2008). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited