Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers
Applied Optics, Vol. 49, Issue 6, pp. 1007-1011 (2010)
http://dx.doi.org/10.1364/AO.49.001007
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Abstract
The x-ray reflectivity of an ultralightweight and low-cost x-ray optic using anisotropic wet etching of Si (110) wafers is evaluated at two energies, C
© 2010 Optical Society of America
OCIS Codes
(170.3890) Medical optics and biotechnology : Medical optics instrumentation
(220.4000) Optical design and fabrication : Microstructure fabrication
(340.7470) X-ray optics : X-ray mirrors
(350.1260) Other areas of optics : Astronomical optics
ToC Category:
X-ray Optics
History
Original Manuscript: September 30, 2009
Revised Manuscript: January 5, 2010
Manuscript Accepted: January 5, 2010
Published: February 17, 2010
Virtual Issues
Vol. 5, Iss. 5 Virtual Journal for Biomedical Optics
Citation
Ikuyuki Mitsuishi, Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita, Yoshitomo Maeda, Noriko Y. Yamasaki, Kazuhisa Mitsuda, Takayuki Shirata, Takayuki Hayashi, Takayuki Takano, and Ryutaro Maeda, "Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers," Appl. Opt. 49, 1007-1011 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-6-1007
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