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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 6 — Feb. 20, 2010
  • pp: 1007–1011

Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers

Ikuyuki Mitsuishi, Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita, Yoshitomo Maeda, Noriko Y. Yamasaki, Kazuhisa Mitsuda, Takayuki Shirata, Takayuki Hayashi, Takayuki Takano, and Ryutaro Maeda  »View Author Affiliations


Applied Optics, Vol. 49, Issue 6, pp. 1007-1011 (2010)
http://dx.doi.org/10.1364/AO.49.001007


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Abstract

The x-ray reflectivity of an ultralightweight and low-cost x-ray optic using anisotropic wet etching of Si (110) wafers is evaluated at two energies, C K α 0.28 keV and Al K α 1.49 keV . The obtained reflectivities at both energies are not represented by a simple planar mirror model considering surface roughness. Hence, an geometrical occultation effect due to step structures upon the etched mirror surface is taken into account. Then, the reflectivities are represented by the theoretical model. The estimated surface roughness at C K α ( 6 nm rms ) is significantly larger than 1 nm at Al K α . This can be explained by different coherent lengths at two energies.

© 2010 Optical Society of America

OCIS Codes
(170.3890) Medical optics and biotechnology : Medical optics instrumentation
(220.4000) Optical design and fabrication : Microstructure fabrication
(340.7470) X-ray optics : X-ray mirrors
(350.1260) Other areas of optics : Astronomical optics

ToC Category:
X-ray Optics

History
Original Manuscript: September 30, 2009
Revised Manuscript: January 5, 2010
Manuscript Accepted: January 5, 2010
Published: February 17, 2010

Virtual Issues
Vol. 5, Iss. 5 Virtual Journal for Biomedical Optics

Citation
Ikuyuki Mitsuishi, Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita, Yoshitomo Maeda, Noriko Y. Yamasaki, Kazuhisa Mitsuda, Takayuki Shirata, Takayuki Hayashi, Takayuki Takano, and Ryutaro Maeda, "Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers," Appl. Opt. 49, 1007-1011 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-6-1007

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