High-spatial-resolution nulling microellipsometer using rotational polarization symmetry
Applied Optics, Vol. 49, Issue 9, pp. 1574-1580 (2010)
http://dx.doi.org/10.1364/AO.49.001574
Enhanced HTML 
Acrobat PDF (843 KB)
Abstract
We report the design and experimental testing of a high-spatial-resolution nulling microellipsometer. This microellipsometer design is based on the previously reported principle of rotational polarization symmetry to improve the signal-to-noise ratio of spatially resolved ellipsometric measurements. Through the use of an electro-optic polarization rotator, a null detection scheme is made possible and implemented. Surface profiling of a lithographically patterned microstructure is demonstrated with the nulling microellipsometer. A lateral spatial resolution of
© 2010 Optical Society of America
OCIS Codes
(070.6110) Fourier optics and signal processing : Spatial filtering
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(260.1440) Physical optics : Birefringence
(260.5430) Physical optics : Polarization
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: December 2, 2009
Manuscript Accepted: February 19, 2010
Published: March 11, 2010
Citation
Alain Tschimwang and Qiwen Zhan, "High-spatial-resolution nulling microellipsometer using rotational polarization symmetry," Appl. Opt. 49, 1574-1580 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-9-1574
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Microellipsometer with Radial Symmetry (AO)
- Determination of local polarization properties of biological samples in the presence of diattenuation by use of Mueller optical coherence tomography (OL)
- Application of space periodic variation of light polarization in imaging polarimetry (AO)
- Pseudopolar decomposition of the Jones and Mueller-Jones exponential polarization matrices (JOSAA)
- Analytic inversion of the Mueller-Jones polarization matrices for homogeneous media (OL)
Related Conference Papers
- Design and Implementation of a Nulling Microellipsometer
- Condition Number as a Metric for the Effectiveness of Polarimetric Algorithms
- Imaging Birefringent Biological Organelles Independent of Their Orientation in 3D Space
- Reduction of the thermal load by laser oscillation in highly Nd3+-doped ceramic YAG
- Stress-Induced Focal Splitting: Effects of Higher Order Symmetry
« Previous Article | Next Article »
OSA is a member of 