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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 9 — Mar. 20, 2010
  • pp: 1599–1606

Effect of fabrication errors on the diffraction pattern produced by sawtooth gratings

Francisco Jose Torcal-Milla, Irina Harder, and Norbert Lindlein  »View Author Affiliations


Applied Optics, Vol. 49, Issue 9, pp. 1599-1606 (2010)
http://dx.doi.org/10.1364/AO.49.001599


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Abstract

In this work we investigate, analytically and numerically, the effect on the diffracted field produced by typical fabrication errors in sawtooth gratings. The analysis is carried out for the near and far field, showing the effects on the intensity and on the diffraction orders efficiency. When the grating profile is not perfect but presents a curved profile or overdevelopment error, some different diffraction orders appear, changing the intensity and the efficiency of each order. In addition, when roughness is present, a decreasing of efficiency is produced, but without generating different diffraction orders than the first one. We show the analytical dependence of these modifications in terms of the profile of the grating, cor roborating the results with numerical methods.

© 2010 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1950) Diffraction and gratings : Diffraction gratings
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Diffraction and Gratings

History
Original Manuscript: December 16, 2009
Manuscript Accepted: February 18, 2010
Published: March 11, 2010

Citation
Francisco Jose Torcal-Milla, Irina Harder, and Norbert Lindlein, "Effect of fabrication errors on the diffraction pattern produced by sawtooth gratings," Appl. Opt. 49, 1599-1606 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-9-1599

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