Methods of high-resolution, high-speed, optical beam deflection and scanning are reviewed with respect to resolution and scanning frequency capabilities. A general description is given of external deflector devices in the categories of variable reflectors, variable refractors, birefringent deflectors, and interference deflectors. The different techniques are then evaluated on the basis of their application to high-speed, high-resolution, precision scanning applications.
V. J. FOWLER and J. SCHLAFER, "A Survey of Laser Beam Deflection Techniques," Appl. Opt. 5, 1675-1682 (1966)