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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 1 — Jan. 1, 2011
  • pp: 50–52

Spectroscopic null ellipsometer using a variable retarder

Lionel R. Watkins and Sophie S. Shamailov  »View Author Affiliations


Applied Optics, Vol. 50, Issue 1, pp. 50-52 (2011)
http://dx.doi.org/10.1364/AO.50.000050


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Abstract

We describe a polarizer–compensator–sample–analyzer (PCSA) null ellipsometer in which a variable retarder is used as the compensator and either the polarizer or the analyzer is held at a fixed azimuthal angle. Ellipsometric angles ψ and Δ are determined directly from the azimuth of the rotating component and the compensator delay, respectively. A Soleil–Babinet compensator with quartz plates is used as the variable delay element and the delay at any wavelength is calculated from the independently measured delay at 632.8 nm and a knowledge of the dispersion of quartz. The thicknesses of thin silicon di oxide films on a silicon wafer were determined both spectroscopically and at a single wavelength and show excellent agreement with those determined using a traditional single wavelength PCSA null ellipsometer.

© 2010 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(240.0240) Optics at surfaces : Optics at surfaces
(260.5430) Physical optics : Polarization

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 23, 2010
Revised Manuscript: November 11, 2010
Manuscript Accepted: November 16, 2010
Published: December 22, 2010

Citation
Lionel R. Watkins and Sophie S. Shamailov, "Spectroscopic null ellipsometer using a variable retarder," Appl. Opt. 50, 50-52 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-1-50


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References

  1. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1987).
  2. H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, 2007).
  3. R. W. Collins, “Automatic rotating element ellipsometers—calibration, operation, and real-time applications,” Rev. Sci. Instrum. 61, 2029–2062 (1990). [CrossRef]
  4. D. E. Aspnes, “Precisionbounds to ellipsometer systems,” Appl. Opt. 14, 1131–1136 (1975). [CrossRef] [PubMed]
  5. R. M. A. Azzam, T. L. Bundy, and N. M. Bashara, “The fixed-polarizer nulling scheme in generalized ellipsometry,” Opt. Commun. 7, 110–115 (1973). [CrossRef]
  6. R. M. A. Azzam, “Poincaré sphere representation of the fixed-polarizer rotating-retarder optical system,” J. Opt. Soc. Am. A 17, 2105–2107 (2000). [CrossRef]
  7. R. M. A. Azzam and N. M. Bashara, “Spacing of the multiple nulls in generalized ellipsometry,” Opt. Commun. 5, 5–9(1972). [CrossRef]
  8. L. R. Watkins and S. S. Shamailov, “Variable angle of incidence spectroscopic autocollimating ellipsometer,” Appl. Opt. 49, 3231–3234 (2010). [CrossRef] [PubMed]
  9. Thin Film Companion, Semiconsoft, Inc., Southborough, Mass. 01772, USA.

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