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Spectroscopic null ellipsometer using a variable retarder |
Applied Optics, Vol. 50, Issue 1, pp. 50-52 (2011)
http://dx.doi.org/10.1364/AO.50.000050
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Abstract
We describe a polarizer–compensator–sample–analyzer (PCSA) null ellipsometer in which a variable retarder is used as the compensator and either the polarizer or the analyzer is held at a fixed azimuthal angle. Ellipsometric angles ψ and Δ are determined directly from the azimuth of the rotating component and the compensator delay, respectively. A Soleil–Babinet compensator with quartz plates is used as the variable delay element and the delay at any wavelength is calculated from the independently measured delay at
© 2010 Optical Society of America
OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(240.0240) Optics at surfaces : Optics at surfaces
(260.5430) Physical optics : Polarization
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: August 23, 2010
Revised Manuscript: November 11, 2010
Manuscript Accepted: November 16, 2010
Published: December 22, 2010
Citation
Lionel R. Watkins and Sophie S. Shamailov, "Spectroscopic null ellipsometer using a variable retarder," Appl. Opt. 50, 50-52 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-1-50
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