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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 1 — Jan. 1, 2011
  • pp: 50–52

Spectroscopic null ellipsometer using a variable retarder

Lionel R. Watkins and Sophie S. Shamailov  »View Author Affiliations

Applied Optics, Vol. 50, Issue 1, pp. 50-52 (2011)

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We describe a polarizer–compensator–sample–analyzer (PCSA) null ellipsometer in which a variable retarder is used as the compensator and either the polarizer or the analyzer is held at a fixed azimuthal angle. Ellipsometric angles ψ and Δ are determined directly from the azimuth of the rotating component and the compensator delay, respectively. A Soleil–Babinet compensator with quartz plates is used as the variable delay element and the delay at any wavelength is calculated from the independently measured delay at 632.8 nm and a knowledge of the dispersion of quartz. The thicknesses of thin silicon di oxide films on a silicon wafer were determined both spectroscopically and at a single wavelength and show excellent agreement with those determined using a traditional single wavelength PCSA null ellipsometer.

© 2010 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(240.0240) Optics at surfaces : Optics at surfaces
(260.5430) Physical optics : Polarization

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 23, 2010
Revised Manuscript: November 11, 2010
Manuscript Accepted: November 16, 2010
Published: December 22, 2010

Lionel R. Watkins and Sophie S. Shamailov, "Spectroscopic null ellipsometer using a variable retarder," Appl. Opt. 50, 50-52 (2011)

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