We report on measurements of the diffraction efficiency of $200\text{-}\mathrm{nm}$ -period freestanding blazed transmission gratings for wavelengths in the 0.96 to $19.4\mathrm{nm}$ range. These critical-angle transmission (CAT) gratings achieve highly efficient blazing over a broad band via total external reflection off the sidewalls of smooth, tens of nanometer thin ultrahigh aspect-ratio silicon grating bars and thus combine the advantages of blazed x-ray reflection gratings with those of more conventional x-ray transmission gratings. Prototype gratings with maximum depths of 3.2 and $6\mathrm{\mu m}$ were investigated at two different blaze angles. In these initial CAT gratings the grating bars are monolithically connected to a cross support mesh that only leaves less than half of the grating area unobstructed. Because of our initial fabrication approach, the support mesh bars feature a strongly trapezoidal cross section that leads to varying CAT grating depths and partial absorption of diffracted orders. While theory predicts broadband absolute diffraction efficiencies as high as 60% for ideal CAT gratings without a support mesh, experimental results show efficiencies in the range of $\sim 50–100\%$ of theoretical predictions when taking the effects of the support mesh into account. Future minimization of the support mesh therefore promises broadband CAT grating absolute diffraction efficiencies of 50% or higher.

© 2011 Optical Society of America

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

Related Journal Articles

• Generalization of the coordinate transformation method with application to surface-relief gratings (JOSAA)
• Profiled Bar Transmission Gratings: Soft-X-Ray Calibration of New Kirchoff Solutions (AO)
• Profiled Bar Transmission Gratings: Soft-X-Ray Calibration of New Kirchoff Solutions- Erratum (AO)
• Blazed high-efficiency x-ray diffraction via transmission through arrays of nanometer-scale mirrors (OE)
• Characterization of zone plate properties using monochromatic synchrotron radiation in the 2 to 20 nm wavelength range (AO)

Related Conference Papers

• Accurate modelling of line-defect photonic crystal waveguides with the RCWA
• Ultrafast Soft X-ray Absorption Spectroscopy in Silicon with 20fs Resolution Using HH Radiation
• Temporal and spatial evolution of beam coupling in Bi₁₂SiO₂₀ under an applied electric field in two wave mixing.
• Beam Energy Exchange Dependence on Grating Period in Bismut Silicate (Bi¹²SiO²⁰) with Optical Activity and Linear Birefringence under Strong Nonlinear Regime
• Beam Energy Exchange Dependence on Grating Period in Bismut Silicate (Bi¹²SiO²⁰) with Optical Activity and Linear Birefringence under Strong Nonlinear Regime