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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 10 — Apr. 1, 2011
  • pp: 1413–1416

Nanometer-scale displacement sensor based on phase-sensitive diffraction grating

Shuangshuang Zhao, Changlun Hou, Jian Bai, Guoguang Yang, and Feng Tian  »View Author Affiliations

Applied Optics, Vol. 50, Issue 10, pp. 1413-1416 (2011)

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In this paper, a nanometer-scale displacement sensor based on a phase-sensitive diffraction grating with interferometeric detection is described and experimentally demonstrated. The proposed displacement sensor consists of a coherent light source, a microstepping motor controller, an integrated grating, a mirror, and a differential circuit. Experimental results show that the displacement sensor has a sensitivity of about 6 mV / nm and a resolution of less than 1 nm . This displacement measurement is an attractive technology with high sensitivity, broad dynamic range, good reliability, and immunity to electromagnetic interference.

© 2011 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(230.1950) Optical devices : Diffraction gratings
(280.4788) Remote sensing and sensors : Optical sensing and sensors

ToC Category:
Remote Sensing and Sensors

Original Manuscript: October 25, 2010
Revised Manuscript: January 24, 2011
Manuscript Accepted: January 24, 2011
Published: March 29, 2011

Shuangshuang Zhao, Changlun Hou, Jian Bai, Guoguang Yang, and Feng Tian, "Nanometer-scale displacement sensor based on phase-sensitive diffraction grating," Appl. Opt. 50, 1413-1416 (2011)

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