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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 10 — Apr. 1, 2011
  • pp: 1453–1464

General approach to reliable characterization of thin metal films

Tatiana V. Amotchkina, Vesna Janicki, Jordi Sancho-Parramon, Alexander V. Tikhonravov, Michael K. Trubetskov, and Hrvoje Zorc  »View Author Affiliations


Applied Optics, Vol. 50, Issue 10, pp. 1453-1464 (2011)
http://dx.doi.org/10.1364/AO.50.001453


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Abstract

Optical constants of thin metal films are strongly dependent on deposition conditions, growth mode, and thickness. We propose a universal characterization approach that allows reliable determination of thin metal film optical constants as functions of wavelength and thickness. We apply this approach to determination of refractive index dispersion of silver island films embedded between silica layers.

© 2011 Optical Society of America

OCIS Codes
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

History
Original Manuscript: November 9, 2010
Revised Manuscript: December 21, 2010
Manuscript Accepted: December 27, 2010
Published: March 30, 2011

Citation
Tatiana V. Amotchkina, Vesna Janicki, Jordi Sancho-Parramon, Alexander V. Tikhonravov, Michael K. Trubetskov, and Hrvoje Zorc, "General approach to reliable characterization of thin metal films," Appl. Opt. 50, 1453-1464 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-10-1453


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References

  1. N. Kaiser, “Review of the fundamentals of thin-film growth,” Appl. Opt. 41, 3053–3060 (2002). [CrossRef] [PubMed]
  2. N. Kaiser, “Optical coatings road-map,” presented at the International Workshop on Optical Coatings In Celebration of Dr. J. A. Dobrowolski’s 50th Year at NRC, Ottawa, Canada, 11 May 2006.
  3. P. Heger, O. Stenzel, and N. Kaiser, “Design and fabrication of selective thin film absorbers on the basis of silver island films,” Vakuum in Forschung und Praxis 18, 53–56 (2006). [CrossRef]
  4. A. Stepanov, “Optical transmission of dielectric layers with metallic nanoparticles inhomogeneously distributed over the sample thickness,” Opt. Spectrosc. 91, 815–819 (2001). [CrossRef]
  5. A. Lehmuskero, M. Kuittinen, and P. Vahimaa, “Refractive index and extinction coefficient dependence of thin al and ir films on deposition technique and thickness,” Opt. Express 15, 10744–10752 (2007). [CrossRef] [PubMed]
  6. O. Stenzel, A. Stendal, M. Röder, S. Wilbrandt, D. Drews, T. Werninghaus, C. von Borczyskowski, and D. Zahn, “Localized plasmon excitation in metal nanoclusters as a tool to study thickness-dependent optical properties of copper phthalocyanine ultrathin films,” Nanotechnology 9, 6–19(1998). [CrossRef]
  7. O. Stenzel, A. Stendal, M. Röder, and C. von Borczyskowski, “Tuning of the plasmon absorption frequency of silver and indium nanoclusters via thin amorphous silicon films,” Pure Appl. Opt. 6, 577–588 (1997). [CrossRef]
  8. A. Leitner, Z. Zhao, H. Brunner, F. Aussenegg, and A. Wokaun, “Optical properties of a metal island film close to a smooth metal surface,” Appl. Opt. 32, 102–110 (1993). [CrossRef] [PubMed]
  9. I. Hooper and J. Sambles, “Some considerations on the transmissivity of thin metal films,” Opt. Express 16, 17249–17257(2008). [CrossRef] [PubMed]
  10. Y. Jourlin, S. Tonchev, A. Tishchenko, C. Pedri, C. Veillas, O. Parriaux, A. Last, and Y. Lacroute, “Spatially and polarization resolved plasmon mediated transmission through continuous metal films,” Opt. Express 17, 12155–12166 (2009). [CrossRef] [PubMed]
  11. T. Iwata and G. Komoda, “Measurements of complex refractive indices of metals at several wavelengths by frustrated total internal reflection due to surface plasmon resonance,” Appl. Opt. 47, 2386–2391 (2008). [CrossRef] [PubMed]
  12. M. Hövel, B. Gompf, and M. Dressel, “Dielectric properties of ultrathin metal films around the percolation threshold,” Phys. Rev. B 81, 035402 (2010). [CrossRef]
  13. A. Nabok, A. Tsargorodskaya, and Suryajaya, “Ellipsometry study of ultra thin layers of evaporated gold,” Phys. Status Solidi C 5, 1150–1155 (2008). [CrossRef]
  14. A. J. de Vries, E. S. Kooij, H. Wormeester, A. A. Mewe, and B. Poelsema, “Ellipsometric study of percolation in electroless deposited silver films,” J. Appl. Phys. 101, 053703 (2007). [CrossRef]
  15. W. Chen, M. D. Thoreson, S. Ishii, A. V. Kildishev, and V. M. Shalaev, “Ultra-thin ultra-smooth and low-loss silver films on a germanium wetting layer,” Opt. Express 18, 5124–5134 (2010). [CrossRef] [PubMed]
  16. H. Zorc, M. Lončarić, J. Sancho-Parramon, and V. Janicki, “Use of gold island films in design of reflectors with high luminosity,” in Optical Interference Coatings (Optical Society of America, 2010), paper TuD8.
  17. J. A. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, “2007 Topical Meeting on Optical Interference Coatings: manufacturing problem,” Appl. Opt. 47, C231 –C245 (2008). [CrossRef] [PubMed]
  18. J. A. Dobrowolski, S. Browning, M. R. Jacobson, and M. Nadal, “2004 Optical Society of America’s Topical Meeting on Optical Interference Coatings: manufacturing problem,” Appl. Opt. 45, 1303–1311 (2006). [CrossRef] [PubMed]
  19. E. D. Palik, Handbook of Optical Constants of Solids(Academic, 1985).
  20. N&K database, http://www.sopra-sa.com/.
  21. P. B. Johnson and R. W. Christy, “Optical constants of the noble metals,” Phys. Rev. B 6, 4370–4379 (1972). [CrossRef]
  22. H. Liu, B. Wang, E. S. P. Leong, P. Yang, Y. Zong, G. Si, J. Teng, and S. A. Maier, “Enhanced surface plasmon resonance on a smooth silver film with a seed growth layer,” ACS Nano 4, 3139–3146 (2010). [CrossRef] [PubMed]
  23. U. Kreibig and M. Vollmer, Optical Properties of Metal Clusters (Springer, 1995).
  24. J. A. Dobrowolski, L. Li, and R. A. Kemp, “Metal/dielectric transmission interference filters with low reflectance. 1. Design,” Appl. Opt. 34, 5673–5683 (1995). [CrossRef] [PubMed]
  25. P. Ma, F. Lin, and G. J. Dobrowolski, “Design and manufacture of metal-dielectric long wavelength cut-off filters,” in Optical Interference Coatings (Optical Society of America, 2010), paper MA9.
  26. A. V. Tikhonravov, M. K. Trubetskov, O. F. Prosovskiy, and M. A. Kokarev, “Optical characterization of thin metal films,” in Optical Interference Coatings (Optical Society of America, 2007), paper WDPDP2.
  27. A. Tikhonravov, M. Trubetskov, T. Amotchkina, M. Kokarev, I. Kozlov, V. Zhupanov, E. Kluev, and O. Prosovskiy, “Optical coatings containing well-controlled few nanometer thick metal layers,” in Nanofair 2008. New Ideas for Industry (WDI Wissensforum GmbH, 2008), pp. 171–174.
  28. A. B. Djurišić, T. Fritz, and K. Leo, “Determination of optical constants of thin absorbing films from normal incidence reflectance and transmittance measurements,” Opt. Commun. 166, 35–42 (1999). [CrossRef]
  29. M. Lončarić, J. Sancho-Parramon, M. Pavlović, H. Zorc, P. Dubček, A. Turković, S. Bernstorff, G. Jakopic, and A. Haase, “Optical and structural characterization of silver islands films on glass substrates,” Vacuum 84, 188–192(2009). [CrossRef]
  30. J. Sancho-Parramon, V. Janicki, J. Arbiol, H. Zorc, and F. Peiro, “Electric field assisted dissolution of metal clusters in metal island films for photonic heterostructures,” Appl. Phys. Lett. 92, 163108 (2008). [CrossRef]
  31. V. Janicki, J. Sancho-Parramon, F. Peiro, and J. Arbiol, “Three-dimensional photonic microstructures produced by electric field assisted dissolution of metal nanoclusters in multilayer stacks,” Appl. Phys. B 98, 93–98, doi: 10.1007/s00340-009-3705-7 (2010). [CrossRef]
  32. A. N. Tikhonov and V. Y. Arsenin, Solution of Ill-Posed Problems (Winston-Wiley, 1977).
  33. J. Sancho-Parramon, J. Ferré-Borrull, S. Bosch, and M. C. Ferrara, “Use of information on the manufacture of samples for the optical characterization of multilayers through a global optimization,” Appl. Opt. 42, 1325–1329(2003). [CrossRef] [PubMed]
  34. A. Lebedev, O. Stenzel, M. Quinten, A. Stendal, M. Röder, M. Schreiber, and D. Zahn, “A statistical approach for interpreting the optical spectra of metal island films: effects of multiple scattering in a statistical assembly of spheres,” J. Opt. A Pure Appl. Opt. 1, 573–580 (1999). [CrossRef]
  35. W. Vargas, D. Azofeifa, N. Clark, and X. Márquez, “Collective response of silver islands on a dielectric substrate when normally illuminated with electromagnetic radiation,” J. Phys. D 41, 025309 (2008). [CrossRef]
  36. O. Stenzel, The Physics of Thin Film Optical Spectra(Springer-Verlag, 2005).
  37. A. V. Tikhonravov, M. K. Trubetskov, J. Hrdina, and J. Sobota, “Characterization of quasi-rugate filters using ellipsometric measurements,” Thin Solid Films 277, 83–89 (1996). [CrossRef]
  38. O. Stenzel and R. Petrich, “Flexible construction of error functions and their minimization: application to the calculation of optical constants of absorbing or scattering thin-film materials from spectrophotometric data,” J. Phys. D 28, 978–989(1995). [CrossRef]
  39. A. Tikhonravov and M. Trubetskov, “Optical characterization of thin films—basic concept,,” presented at the XIV OptiLayer Workshop in Europe, Hannover, 22–24 March 2010, and the VII OptiLayer Workshop in the USA, Santa Clara, 16–18 November 2009.
  40. A. Tikhonravov and M. Trubetskov, “Thin film characterization using spectral ellipsometric data,” presented at the XIV OptiLayer Workshop in Europe, Hannover, 22–24 March 2010, and the VII OptiLayer Workshop in the USA, Santa Clara, 16–18 November 2009.
  41. A. V. Tikhonravov and M. K. Trubetskov, OptiLayer thin film software, http://www.optilayer.com.
  42. J. Sancho-Parramon, “Surface plasmon resonance broadening of metallic particles in the quasi-static approximation: a numerical study of size confinement and interparticle interaction effects,” Nanotechnology 20, 235706 (2009). [CrossRef] [PubMed]
  43. R. R. Singer, A. Leitner, and F. R. Aussenegg, “Structure analysis and models for optical constants of discontinuous metallic silver films,” J. Opt. Soc. Am. B 12, 220–228 (1995). [CrossRef]
  44. R. G. Barrera, M. del Castillo-Mussot, G. Monsivais, P. Villaseor, and W. L. Mochán, “Optical properties of two-dimensional disordered systems on a substrate,” Phys. Rev. B 43, 13819–13826 (1991). [CrossRef]
  45. A. Forouhi and I. Bloomer, “Calculation of optical constants, n and k, in the interband region,” in Handbook of Optical Constants of Solids II, E.Palik, ed. (Academic, 1991), pp. 151–175.

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