OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 11 — Apr. 10, 2011
  • pp: 1610–1619

Thermal and stress studies of normal incidence Mo / B 4 C multilayers for a 6.7 nm wavelength

Miriam Barthelmess and Saša Bajt  »View Author Affiliations


Applied Optics, Vol. 50, Issue 11, pp. 1610-1619 (2011)
http://dx.doi.org/10.1364/AO.50.001610


View Full Text Article

Enhanced HTML    Acrobat PDF (640 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Wavelength, reflectance, and stress stability of Mo / B 4 C multilayers were studied as a function of postdeposition annealing up to 900 ° C . These multilayers are of interest as normal incidence coatings for wavelengths above the boron K-absorption edge. Mo / B 4 C multilayers deposited at low sputtering pressure have high compressive stress. Zero stress can be achieved at 360 ° C 370 ° C , but annealing at < 200 ° C is sufficient to reduce stress by 40 % . This stress relaxation is accompanied with a multilayer period expansion of 0.02 nm and a < 0.5 % decrease in normal incidence reflectivity. The multilayer period remains stable up to 600 ° C , while intrinsic stress changes from compressive to tensile. A four-layer model with amorphous molybdenum and boron carbide layers separated by amorphous layers of molybdenum borides ( Mo x B y ) is presented. These interlayers are present already in the as-deposited state and continue to grow with increasing temperature. Their presence lowers the optical contrast and the achievable reflectivity. However, they also increase multilayer thermal stability. At temperatures > 600 ° C , a noticeable decrease in reflectivity associated with the phase transition from amorphous to crystalline molybdenum boride is observed. This is accompanied with an increase in interface and surface roughness and a change in stress as a function of temperature.

© 2011 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(230.4170) Optical devices : Multilayers
(310.1860) Thin films : Deposition and fabrication
(340.7470) X-ray optics : X-ray mirrors
(310.4165) Thin films : Multilayer design
(310.4925) Thin films : Other properties (stress, chemical, etc.)

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: November 24, 2010
Revised Manuscript: February 15, 2011
Manuscript Accepted: February 15, 2011
Published: April 7, 2011

Citation
Miriam Barthelmess and Saša Bajt, "Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength," Appl. Opt. 50, 1610-1619 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-11-1610

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited