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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 11 — Apr. 10, 2011
  • pp: 1610–1619

Thermal and stress studies of normal incidence Mo / B 4 C multilayers for a 6.7 nm wavelength

Miriam Barthelmess and Saša Bajt  »View Author Affiliations


Applied Optics, Vol. 50, Issue 11, pp. 1610-1619 (2011)
http://dx.doi.org/10.1364/AO.50.001610


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Abstract

Wavelength, reflectance, and stress stability of Mo / B 4 C multilayers were studied as a function of postdeposition annealing up to 900 ° C . These multilayers are of interest as normal incidence coatings for wavelengths above the boron K-absorption edge. Mo / B 4 C multilayers deposited at low sputtering pressure have high compressive stress. Zero stress can be achieved at 360 ° C 370 ° C , but annealing at < 200 ° C is sufficient to reduce stress by 40 % . This stress relaxation is accompanied with a multilayer period expansion of 0.02 nm and a < 0.5 % decrease in normal incidence reflectivity. The multilayer period remains stable up to 600 ° C , while intrinsic stress changes from compressive to tensile. A four-layer model with amorphous molybdenum and boron carbide layers separated by amorphous layers of molybdenum borides ( Mo x B y ) is presented. These interlayers are present already in the as-deposited state and continue to grow with increasing temperature. Their presence lowers the optical contrast and the achievable reflectivity. However, they also increase multilayer thermal stability. At temperatures > 600 ° C , a noticeable decrease in reflectivity associated with the phase transition from amorphous to crystalline molybdenum boride is observed. This is accompanied with an increase in interface and surface roughness and a change in stress as a function of temperature.

© 2011 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(230.4170) Optical devices : Multilayers
(310.1860) Thin films : Deposition and fabrication
(340.7470) X-ray optics : X-ray mirrors
(310.4165) Thin films : Multilayer design
(310.4925) Thin films : Other properties (stress, chemical, etc.)

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: November 24, 2010
Revised Manuscript: February 15, 2011
Manuscript Accepted: February 15, 2011
Published: April 7, 2011

Citation
Miriam Barthelmess and Saša Bajt, "Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength," Appl. Opt. 50, 1610-1619 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-11-1610


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