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Polymeric optofluidic Fabry-Perot sensor by direct laser machining and hot embossing |
Applied Optics, Vol. 50, Issue 13, pp. 1843-1849 (2011)
http://dx.doi.org/10.1364/AO.50.001843
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Abstract
We present a polymeric-based Fabry–Perot optofluidic sensor fabricated by combining direct laser machining and hot embossing. This technique provides a more elegant solution to conventional hot embossing by increasing the production rate, improving the reproducibility, and further reducing the cost, providing a large working area and flexibility in design modification and customization. As a proof of concept, a Fabry–Perot (F–P) optofluidic sensor was fabricated in polymethyl methacrylate (PMMA) from a micromachined stamp. The experimental results of the sensor agree well with analytical calculations and show a sensitivity of
© 2011 Optical Society of America
OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(130.6010) Integrated optics : Sensors
(220.4610) Optical design and fabrication : Optical fabrication
(230.4000) Optical devices : Microstructure fabrication
(280.4788) Remote sensing and sensors : Optical sensing and sensors
ToC Category:
Optical Devices
History
Original Manuscript: November 19, 2010
Revised Manuscript: March 3, 2011
Manuscript Accepted: March 4, 2011
Published: April 25, 2011
Citation
Jing Wu, Daniel Day, and Min Gu, "Polymeric optofluidic Fabry-Perot sensor by direct laser machining and hot embossing," Appl. Opt. 50, 1843-1849 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-13-1843
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