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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 15 — May. 20, 2011
  • pp: 2246–2254

Surface profile measurement in white-light scanning interferometry using a three-chip color CCD

Suodong Ma, Chenggen Quan, Rihong Zhu, Cho Jui Tay, and Lei Chen  »View Author Affiliations


Applied Optics, Vol. 50, Issue 15, pp. 2246-2254 (2011)
http://dx.doi.org/10.1364/AO.50.002246


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Abstract

White-light scanning interferometry (WLSI) is a useful technique to measure surface profile when a test object contains discontinuous structures or microstructures. A black and white CCD camera is usually utilized to capture interferograms, and a series of corresponding algorithms is used to achieve the profile measurement. However, the color information in the interferograms is lost. A novel profile measurement method that uses phase information in different color channels (red–green–blue) of an interferogram obtained using a three-chip color CCD in WLSI is proposed. The phase values are extracted by a windowed Fourier transform algorithm. Simulation and experimental results are presented to demonstrate the validity of the proposed method.

© 2011 Optical Society of America

OCIS Codes
(100.5070) Image processing : Phase retrieval
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: January 24, 2011
Revised Manuscript: March 3, 2011
Manuscript Accepted: March 9, 2011
Published: May 18, 2011

Citation
Suodong Ma, Chenggen Quan, Rihong Zhu, Cho Jui Tay, and Lei Chen, "Surface profile measurement in white-light scanning interferometry using a three-chip color CCD," Appl. Opt. 50, 2246-2254 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-15-2246

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