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Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces |
Applied Optics, Vol. 50, Issue 16, pp. 2342-2348 (2011)
http://dx.doi.org/10.1364/AO.50.002342
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Abstract
A point diffraction interferometer (PDI) with adjustable fringe contrast is presented for the high- precision testing of spherical surfaces. The polarizing components are employed in the PDI to transform the polarization states of the test and reference beams, and a good fringe contrast can be realized by adjusting the relative intensities of interfering waves. The proposed system is compact and simple in structure, and it provides a feasible way for high-precision testing of spherical surfaces with low reflectivity. The theory of the interferometer is introduced in detail, along with the properties of optical components employed in the system, numerical analysis of systematic error, and the corresponding calibration procedure. Compared with the testing results of the ZYGO interferometer, a high accuracy with RMS value about
© 2011 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: November 9, 2010
Revised Manuscript: February 15, 2011
Manuscript Accepted: March 15, 2011
Published: May 20, 2011
Citation
Daodang Wang, Yongying Yang, Chen Chen, and Yongmo Zhuo, "Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces," Appl. Opt. 50, 2342-2348 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-16-2342
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