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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 16 — Jun. 1, 2011
  • pp: 2383–2390

Maskless fabrication of three-dimensional microstructures with high isotropic resolution: practical and theoretical considerations

Jun-Gyu Hur  »View Author Affiliations


Applied Optics, Vol. 50, Issue 16, pp. 2383-2390 (2011)
http://dx.doi.org/10.1364/AO.50.002383


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Abstract

A maskless three-dimensional (3D) microfabrication method based on a digital micromirror device (DMD) is proposed for high lateral and vertical resolution. A substrate is scanned laterally under virtual masks of the DMD. The masks are allocated to a large number of virtual slices, all of which are projected in a single scan of the stage. A theoretical model for the cumulative dose distribution in a photoresist is derived and used to predict the resulting 3D profile. Experiments showed that the proposed method is promising for avoiding the stair-step problem and preventing misalignment errors.

© 2011 Optical Society of America

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3990) Optical devices : Micro-optical devices
(230.4000) Optical devices : Microstructure fabrication
(050.6875) Diffraction and gratings : Three-dimensional fabrication
(110.6895) Imaging systems : Three-dimensional lithography
(130.3990) Integrated optics : Micro-optical devices

ToC Category:
Integrated Optics

History
Original Manuscript: January 4, 2011
Revised Manuscript: March 16, 2011
Manuscript Accepted: March 21, 2011
Published: May 24, 2011

Citation
Jun-Gyu Hur, "Maskless fabrication of three-dimensional microstructures with high isotropic resolution: practical and theoretical considerations," Appl. Opt. 50, 2383-2390 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-16-2383

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