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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 18 — Jun. 20, 2011
  • pp: 2815–2822

Method for designing phase-calculation algorithms for two-dimensional grating phase-shifting interferometry

Yucong Zhu, Satoru Odate, Ayako Sugaya, Katsura Otaki, Katsumi Sugisaki, Chiaki Koike, Tetsuya Koike, and Kiyoshi Uchikawa  »View Author Affiliations


Applied Optics, Vol. 50, Issue 18, pp. 2815-2822 (2011)
http://dx.doi.org/10.1364/AO.50.002815


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Abstract

We propose a design method of phase-analysis algorithms based on two-dimensional grating phase shifting for Talbot interferometry, Talbot-Lau imaging, or the Ronchi test. These algorithms are designed to separate the two orthogonal shearing wavefronts and eliminate error effects of unwanted diffraction orders, simultaneously. Taking the effect of multidiffraction into account, moving the two-dimensional grating along a certain pass leads to a series of phase-shifted interfrograms, from which two orthogonal shearing wavefronts are derived, for the tested wavefront to be retrieved. The designing process is demonstrated, and the residual errors are analyzed via simulation works and experimental comparison.

© 2011 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: January 19, 2011
Revised Manuscript: April 13, 2011
Manuscript Accepted: April 14, 2011
Published: June 10, 2011

Citation
Yucong Zhu, Satoru Odate, Ayako Sugaya, Katsura Otaki, Katsumi Sugisaki, Chiaki Koike, Tetsuya Koike, and Kiyoshi Uchikawa, "Method for designing phase-calculation algorithms for two-dimensional grating phase-shifting interferometry," Appl. Opt. 50, 2815-2822 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-18-2815


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