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Measurement of the surface profile of a curved optical surface with rotation phase-shifting lateral shear cyclic path optical configuration |
Applied Optics, Vol. 50, Issue 18, pp. 2823-2830 (2011)
http://dx.doi.org/10.1364/AO.50.002823
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Abstract
We present a new (to our knowledge) technique for introducing phase shifts between the laterally sheared emergent beam components of a cyclic path optical configuration (CPOC). The phase shifts are introduced by applying a small change in the angle of incidence of the incident beam due to the small angular rotation of the CPOC setup. Phase-shifting interferometry has been applied along with this phase-shifting technique for a CPOC with lateral shear to find the surface slope/profile of curved optical surfaces. Results for a spherical optical surface have been discussed. An optical setup for measurement of the surface profile of toroidal beam line mirrors of synchrotron radiation sources is proposed.
© 2011 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: January 28, 2011
Revised Manuscript: April 5, 2011
Manuscript Accepted: April 9, 2011
Published: June 10, 2011
Citation
Sanjib Chatterjee and Y. Pavan Kumar, "Measurement of the surface profile of a curved optical surface with rotation phase-shifting lateral shear cyclic path optical configuration," Appl. Opt. 50, 2823-2830 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-18-2823
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