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Design of the double-telecentric high-aperture diffractive–refractive objectives |
Applied Optics, Vol. 50, Issue 19, pp. 3254-3258 (2011)
http://dx.doi.org/10.1364/AO.50.003254
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Abstract
The possibility for achieving optical performance of objectives, including a minimum amount of diffractive lenses, comparable to optical performance of multiple-lens conventional objectives for nanolithography, is considered. The problem of chromatism connected with using excimer lasers is solved by applying aspheric substrates that help to reduce both axial color and spherochromatic aberration.
© 2011 Optical Society of America
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(120.3620) Instrumentation, measurement, and metrology : Lens system design
(220.1000) Optical design and fabrication : Aberration compensation
(220.3620) Optical design and fabrication : Lens system design
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: January 25, 2011
Revised Manuscript: May 1, 2011
Manuscript Accepted: May 12, 2011
Published: June 28, 2011
Citation
Grigoriy I. Greisukh, Evgeniy G. Ezhov, Il’ya A. Levin, and Sergei A. Stepanov, "Design of the double-telecentric high-aperture diffractive–refractive objectives," Appl. Opt. 50, 3254-3258 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-19-3254
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