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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 20 — Jul. 10, 2011
  • pp: 3389–3395

Comparison of algorithms used for optical characterization of multilayer optical coatings

Tatiana V. Amotchkina, Michael K. Trubetskov, Vladimir Pervak, Sebastian Schlichting, Henrik Ehlers, Detlev Ristau, and Alexander V. Tikhonravov  »View Author Affiliations


Applied Optics, Vol. 50, Issue 20, pp. 3389-3395 (2011)
http://dx.doi.org/10.1364/AO.50.003389


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Abstract

Two algorithms used for the on-line and off-line characterization of multilayer optical coatings are experimentally compared using test samples produced by two different deposition processes and different monitoring approaches. One of these algorithms, called the triangular algorithm, demonstrates its superiority in all considered situations. We performed experiments with multilayer samples formed by high-density thin films, which allowed us to neglect possible errors in the film refractive indices and concentrate only on errors in the thicknesses of the layers of the produced coatings.

© 2011 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

History
Original Manuscript: March 28, 2011
Revised Manuscript: May 18, 2011
Manuscript Accepted: May 18, 2011
Published: July 1, 2011

Citation
Tatiana V. Amotchkina, Michael K. Trubetskov, Vladimir Pervak, Sebastian Schlichting, Henrik Ehlers, Detlev Ristau, and Alexander V. Tikhonravov, "Comparison of algorithms used for optical characterization of multilayer optical coatings," Appl. Opt. 50, 3389-3395 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-20-3389

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