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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 20 — Jul. 10, 2011
  • pp: 3482–3487

Reference surface calibration of a Fizeau interferometer through even/odd synthesis

Weibo Wang, Jiubin Tan, Tong Wang, Meiyu Li, and Jianbo Tang  »View Author Affiliations


Applied Optics, Vol. 50, Issue 20, pp. 3482-3487 (2011)
http://dx.doi.org/10.1364/AO.50.003482


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Abstract

We propose an even-/odd-synthesis method for the elimination of additional aberration caused by misalignment or environmental vibration during the calibration of a Fizeau interferometer reference surface (RS). The odd and even parts of an RS can be obtained, because surface errors could be divided into rotationally symmetric and nonrotationally symmetric terms. We then propose a least-squares algorithm with a dual-objective optimization function for calibration of the measurement results at the confocal position. Finally, a complete RS can be eventually obtained by synthesizing the odd and even parts of the RS. It has been verified through experiments that the measurement repeatability of the PV value is better than 0.003 λ , and the root-mean-square value is better than 0.0003 λ .

© 2011 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: January 10, 2011
Revised Manuscript: May 6, 2011
Manuscript Accepted: May 19, 2011
Published: July 5, 2011

Citation
Weibo Wang, Jiubin Tan, Tong Wang, Meiyu Li, and Jianbo Tang, "Reference surface calibration of a Fizeau interferometer through even/odd synthesis," Appl. Opt. 50, 3482-3487 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-20-3482

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