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Modeling of through-focus aerial image with aberration and imaginary mask edge effects in optical lithography simulation |
Applied Optics, Vol. 50, Issue 20, pp. 3570-3578 (2011)
http://dx.doi.org/10.1364/AO.50.003570
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Abstract
Aerial image through focus in the presence of aberrations and electromagnetic edge effects modeled by adding
© 2011 Optical Society of America
OCIS Codes
(110.2990) Imaging systems : Image formation theory
(110.4980) Imaging systems : Partial coherence in imaging
(110.5220) Imaging systems : Photolithography
ToC Category:
Imaging Systems
History
Original Manuscript: January 19, 2011
Revised Manuscript: May 20, 2011
Manuscript Accepted: May 24, 2011
Published: July 7, 2011
Citation
Kenji Yamazoe and Andrew R. Neureuther, "Modeling of through-focus aerial image with aberration and imaginary mask edge effects in optical lithography simulation," Appl. Opt. 50, 3570-3578 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-20-3570
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