OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 20 — Jul. 10, 2011
  • pp: 3678–3684

Optical modeling of Fresnel zoneplate microscopes

Patrick P. Naulleau, Iacopo Mochi, and Kenneth A. Goldberg  »View Author Affiliations


Applied Optics, Vol. 50, Issue 20, pp. 3678-3684 (2011)
http://dx.doi.org/10.1364/AO.50.003678


View Full Text Article

Enhanced HTML    Acrobat PDF (935 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Defect free masks remain one of the most significant challenges facing the commercialization of extreme ultraviolet (EUV) lithography. Progress on this front requires high-performance wavelength-specific metrology of EUV masks, including high-resolution and aerial-image microscopy performed near the 13.5 ‚ÄČ nm wavelength. Arguably the most cost-effective and rapid path to proliferating this capability is through the development of Fresnel zoneplate-based microscopes. Given the relative obscurity of such systems, however, modeling tools are not necessarily optimized to deal with them and their imaging properties are poorly understood. Here we present a modeling methodology to analyze zoneplate microscopes based on commercially available optical modeling software and use the technique to investigate the imaging performance of an off-axis EUV microscope design. The modeling predicts that superior performance can be achieved by tilting the zoneplate, making it perpendicular to the chief ray at the center of the field, while designing the zoneplate to explicitly work in that tilted plane. Although the examples presented here are in the realm of EUV mask inspection, the methods described and analysis results are broadly applicable to zoneplate microscopes in general, including full-field soft-x-ray microscopes rou tinely used in the synchrotron community.

© 2011 Optical Society of America

OCIS Codes
(090.1970) Holography : Diffractive optics
(110.0180) Imaging systems : Microscopy
(110.7440) Imaging systems : X-ray imaging
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(260.7200) Physical optics : Ultraviolet, extreme
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:
Imaging Systems

History
Original Manuscript: April 13, 2011
Revised Manuscript: May 30, 2011
Manuscript Accepted: May 31, 2011
Published: July 8, 2011

Virtual Issues
Vol. 6, Iss. 8 Virtual Journal for Biomedical Optics

Citation
Patrick P. Naulleau, Iacopo Mochi, and Kenneth A. Goldberg, "Optical modeling of Fresnel zoneplate microscopes," Appl. Opt. 50, 3678-3684 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-20-3678

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited