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Automatic parameter optimization of the local model fitting method for single-shot surface profiling |
Applied Optics, Vol. 50, Issue 21, pp. 3773-3780 (2011)
http://dx.doi.org/10.1364/AO.50.003773
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Abstract
The local model fitting (LMF) method is a single-shot surface profiling algorithm. Its measurement principle is based on the assumption that the target surface to be profiled is locally flat, which enables us to utilize the information brought by nearby pixels in the single interference image for robust LMF. Given that the shape and size of the local area is appropriately determined, the LMF method was demonstrated to provide very accurate measurement results. However, the appropriate choice of the local area often requires prior knowledge on the target surface profile or manual parameter tuning. To cope with this problem, we propose a method for automatically determining the shape and size of local regions only from the single interference image. The effectiveness of the proposed method is demonstrated through experiments.
© 2011 Optical Society of America
OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(240.6700) Optics at surfaces : Surfaces
ToC Category:
Optics at Surfaces
History
Original Manuscript: January 19, 2011
Revised Manuscript: April 13, 2011
Manuscript Accepted: May 3, 2011
Published: July 11, 2011
Citation
Syogo Mori, Masashi Sugiyama, Hidemitsu Ogawa, Katsuichi Kitagawa, and Kei Irie, "Automatic parameter optimization of the local model fitting method for single-shot surface profiling," Appl. Opt. 50, 3773-3780 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-21-3773
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