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Linear diffraction grating interferometer with high alignment tolerance and high accuracy |
Applied Optics, Vol. 50, Issue 22, pp. 4550-4556 (2011)
http://dx.doi.org/10.1364/AO.50.004550
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Abstract
We present an innovative structure of a linear diffraction grating interferometer as a long stroke and nanometer resolution displacement sensor for any linear stage. The principle of this diffractive interferometer is based on the phase information encoded by the
© 2011 Optical Society of America
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
History
Original Manuscript: April 29, 2011
Manuscript Accepted: June 9, 2011
Published: July 29, 2011
Citation
Fang Cheng and Kuang-Chao Fan, "Linear diffraction grating interferometer with high alignment tolerance and high accuracy," Appl. Opt. 50, 4550-4556 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-22-4550
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