Abstract

A scanning and rotating nanoslit is used to measure submicrometer features in focused spot distributions. Using a filtered backprojection technique, a highly accurate reconstruction is demonstrated. Experimental results are confirmed by simulating the scanning slit technique using a physical optics simulation program. Analysis of various error mechanisms is reported, and the reconstruction algo rithm is determined to be very resilient. The slit is $125\mathrm{nm}$ wide and $50\mathrm{\mu m}$ long and is fabricated on a $120\mathrm{nm}$ thick layer of aluminum. The size of the image field is $15\mathrm{\mu m}$, and simulations indicate that $200\mathrm{nm}$ Rayleigh resolution is possible with an infinitely narrow slit.

© 2011 Optical Society of America

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