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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 24 — Aug. 20, 2011
  • pp: 4746–4754

Spot distribution measurement using a scanning nanoslit

Anoop George and Tom D. Milster  »View Author Affiliations


Applied Optics, Vol. 50, Issue 24, pp. 4746-4754 (2011)
http://dx.doi.org/10.1364/AO.50.004746


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Abstract

A scanning and rotating nanoslit is used to measure submicrometer features in focused spot distributions. Using a filtered backprojection technique, a highly accurate reconstruction is demonstrated. Experimental results are confirmed by simulating the scanning slit technique using a physical optics simulation program. Analysis of various error mechanisms is reported, and the reconstruction algo rithm is determined to be very resilient. The slit is 125 nm wide and 50 μm long and is fabricated on a 120 nm thick layer of aluminum. The size of the image field is 15 μm , and simulations indicate that 200 nm Rayleigh resolution is possible with an infinitely narrow slit.

© 2011 Optical Society of America

OCIS Codes
(110.1220) Imaging systems : Apertures
(110.2960) Imaging systems : Image analysis
(310.6628) Thin films : Subwavelength structures, nanostructures
(110.6955) Imaging systems : Tomographic imaging

ToC Category:
Imaging Systems

History
Original Manuscript: January 19, 2011
Manuscript Accepted: June 2, 2011
Published: August 11, 2011

Citation
Anoop George and Tom D. Milster, "Spot distribution measurement using a scanning nanoslit," Appl. Opt. 50, 4746-4754 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-24-4746


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References

  1. H. M. Hertz and R. L. Byer, “Tomographic imaging of micrometer-sized optical and soft-x-ray beams,” Opt. Lett. 15, 396–398 (1990). [CrossRef] [PubMed]
  2. S. Samson and A. Korpel, “Two-dimensional operation of a scanning optical microscope by vibrating knife-edge tomography,” Appl. Opt. 34, 285–289 (1995). [CrossRef] [PubMed]
  3. J. Soto, M. Rendon, and M. Martın, “Experimental demonstration of tomographic slit technique for measurement of arbitrary intensity profiles of light beams,” Appl. Opt. 36, 7450–7454 (1997). [CrossRef]
  4. J. Zheng, S. Zhao, Q. Wang, X. Zhang, and L. Chen, “Measurement of beam quality factor (M2) by slit-scanning method,” Opt. Laser Technol. 33, 213–217 (2001). [CrossRef]
  5. R. L. McCally, “Measurement of Gaussian beam parameters,” Appl. Opt. 23 , 2227 (1984). [CrossRef] [PubMed]
  6. http://www.photon-inc.com/products/nanoscan/nanoscan.html
  7. http://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=804
  8. http://www.dataray.com/pdf/BSDataSh.pdf
  9. https://www.cvilaser.com/products/Documents/Catalog/Measurement_of_Beam_Profiles.pdf
  10. M. A. Kujoory, E. L. Miller, H. H. Barrett, G. R. Gindi, and P. N. Tamura, “Coded aperture imaging of γ-ray sources with an off-axis rotating slit,” Appl. Opt. 19, 4186–4195 (1980). [CrossRef] [PubMed]
  11. T. E. Gureyev, Y. I. Nesterets, K. M. Pavlov, and S. W. Wilkins, “Computed tomography with linear shift-invariant optical systems,” J. Opt. Soc. Am. A 24, 2230–2241 (2007). [CrossRef]
  12. J. Soto, “Arbitrary-intensity-profiles measurement of laser beams by a scanning and rotating slit,” Appl. Opt. 32, 7272–7276 (1993). [CrossRef] [PubMed]
  13. A. George and T. D. Milster, “Characteristics of a scanning nano-slit image sensor for line-and-space patterns,” Appl. Opt. 49, 3821–3830 (2010). [CrossRef] [PubMed]
  14. G. T. Herman, Fundamentals of Computerized Tomography: Image Reconstruction from Projections, 2nd ed. (Springer, 2009).
  15. H. H. Barrett and W. Swindell, Radiological Imaging: The Theory of Image Formation, Detection, and Processing (Academic, 1981), Vol.  2, pp. 413–417.
  16. T. D. Milster and C. L. Vernold, “Technique for aligning optical and mechanical axes based on a rotating linear grating,” Opt. Eng. 34, 2840–2845 (1995). [CrossRef]
  17. http://www.optics.arizona.edu/Milster/optiscan/OptiScan_MENU_PAGE.htm
  18. http://www.zemax.com
  19. D. Malacara, Optical Shop Testing (Wiley-Interscience, 1992), p. 465.
  20. H. Sun, “Measurement of laser diode astigmatism,” Opt. Eng. 36, 1082–1087 (1997). [CrossRef]
  21. http://www.thorlabs.us/NewGroupPage9.cfm?ObjectGroup_ID=2421
  22. M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University, 1999), p. 371.

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