|
Optimal proportional relation between laser power and pulse number for the fabrication of surface-microstructured silicon |
Applied Optics, Vol. 50, Issue 24, pp. 4765-4768 (2011)
http://dx.doi.org/10.1364/AO.50.004765
Enhanced HTML 
Acrobat PDF (448 KB)
Abstract
We experimentally demonstrate that, under the same laser fluence, there exists an optimal proportional relation between the laser power and pulse number for the fabrication of surface-microstructured silicon. During this fabrication process, the pulse number represents the interaction time between the laser and the silicon, which determines the depth of energy transferred into the inner part of the material, while the laser power determines the ablation and volatilization rate of the silicon. The proper combination of laser power and pulse number can ablate the material on the silicon surface effectively and have enough time to transfer the energy into the deep layer, which can produce microstructured silicon with a high spike. In addition, we compare the absorptance of samples etched by different combinations of laser power and pulse number; the corresponding results further prove the existence of an optimal proportional relation.
© 2011 Optical Society of America
OCIS Codes
(160.5140) Materials : Photoconductive materials
(300.1030) Spectroscopy : Absorption
ToC Category:
Materials
History
Original Manuscript: June 16, 2011
Revised Manuscript: July 3, 2011
Manuscript Accepted: July 12, 2011
Published: August 15, 2011
Citation
Yan Peng, Ya Wen, DongSheng Zhang, ShiDa Luo, Lin Chen, and YiMing Zhu, "Optimal proportional relation between laser power and pulse number for the fabrication of surface-microstructured silicon," Appl. Opt. 50, 4765-4768 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-24-4765
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Diode-pumped singly resonant continuous-wave optical parametric oscillator with wide continuous tuning of the near-infrared idler wave (OL)
- Spectral measurement of absorption by spectroscopic frequency-domain optical coherence tomography (OL)
- Combined grazing-angle and normal-incidence reflectometry of absorbing media (JOSAA)
- Absorption spectra of a dielectric grating on a metal substrate (JOSAA)
- Differences in the evolution of surface-microstructured silicon fabricated by femtosecond laser pulses with different wavelength (AO)
Related Conference Papers
- Modified reciprocity method in laser crystals spectroscopy
- Application of cavity ring-down spectroscopy to sputter erosion measurements
- UV absorption of CO2 for temperature diagnostics
- Small orbital planetary lidar for measurement of water vapor, cloud and aerosol profiles
- High temperature water vapor measured with VCSEL near 940 nm
« Previous Article | Next Article »
OSA is a member of 