Modern miniaturized scanning grating spectrometers (SGSs) are often based on microelectromechanical system devices. In contrast to classical spectrometers, such systems exhibit additional design constraints, like a symmetrical motion of the grating with a limited deflection. A detailed mathematical analysis of typical SGS configurations based on the grating equation considering these constraints is presented. Equations that relate the basic angles on a scanning grating to the grating properties and the attainable wavelength range of a spectrometer are derived, and the solution set is examined. Furthermore, the analytical description can be used to optimize SGSs with symmetrically moving gratings. The attainable spectral range for a given deflection amplitude of the grating can be calculated. Alternatively, the required grating properties can be determined for a given spectral range.
© 2011 Optical Society of America
Instrumentation, Measurement, and Metrology
Original Manuscript: May 27, 2011
Manuscript Accepted: July 13, 2011
Published: August 19, 2011
Tino Puegner, Jens Knobbe, and Hubert Lakner, "Basic angles in microelectromechanical system scanning grating spectrometers," Appl. Opt. 50, 4894-4902 (2011)