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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 26 — Sep. 10, 2011
  • pp: 5139–5148

Ultrasensitive guided-mode resonance biosensors superimposed with vertical-sidewall roughness

Chih-Sheng Jao and Hoang Yan Lin  »View Author Affiliations

Applied Optics, Vol. 50, Issue 26, pp. 5139-5148 (2011)

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In this paper, we present our investigations of the effects of vertical-sidewall roughness (VSR) on guided-mode resonance (GMR) filters made of subwavelength grating for applications to ultrasensitive biosensors operated under IR illumination. We designed the spectral FWHM of the grating filter to be as narrow as possible in order to emphasize the sensitivity and VSR effects. Three types of VSR morphologies on the grating—in terms of the correlation length ξ and the rms of the maximum roughness deviation σ—were considered and evaluated. Rigorous coupled-wave analysis was then implemented to quantify the shifts in the reflective resonance peak wavelength value (PWV) of the grating filter. Our simulations show that for specific ξ values, the PWVs remain constant even if σ becomes as large as 10 nm ; this indicates dramatic bandgaplike stripes, which are similar to the bandgaps observed in the band diagrams of photonic crystals in the ξ σ diagram that we have proposed in this study. In other words, the effects of VSR on the GMR biosensor performance are insignificant when ξ is located at certain bands; therefore, this type of roughness is highly tolerable even if the linewidth of the filter is decreased to only a few tens of nanometers.

© 2011 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(220.3740) Optical design and fabrication : Lithography
(240.5770) Optics at surfaces : Roughness
(050.5745) Diffraction and gratings : Resonance domain

ToC Category:
Diffraction and Gratings

Original Manuscript: March 28, 2011
Revised Manuscript: July 8, 2011
Manuscript Accepted: July 12, 2011
Published: September 8, 2011

Chih-Sheng Jao and Hoang Yan Lin, "Ultrasensitive guided-mode resonance biosensors superimposed with vertical-sidewall roughness," Appl. Opt. 50, 5139-5148 (2011)

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