OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 27 — Sep. 20, 2011
  • pp: 5221–5227

Ion beam machining error control and correction for small scale optics

Xuhui Xie, Lin Zhou, Yifan Dai, and Shengyi Li  »View Author Affiliations


Applied Optics, Vol. 50, Issue 27, pp. 5221-5227 (2011)
http://dx.doi.org/10.1364/AO.50.005221


View Full Text Article

Enhanced HTML    Acrobat PDF (990 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Ion beam figuring (IBF) technology for small scale optical components is discussed. Since the small removal function can be obtained in IBF, it makes computer-controlled optical surfacing technology possible to machine precision centimeter- or millimeter-scale optical components deterministically. Using a small ion beam to machine small optical components, there are some key problems, such as small ion beam positioning on the optical surface, material removal rate, ion beam scanning pitch control on the optical surface, and so on, that must be seriously considered. The main reasons for the problems are that it is more sensitive to the above problems than a big ion beam because of its small beam diameter and lower material ratio. In this paper, we discuss these problems and their influences in machining small optical components in detail. Based on the identification–compensation principle, an iterative machining compensation method is deduced for correcting the positioning error of an ion beam with the material removal rate estimated by a selected optimal scanning pitch. Experiments on ϕ 10 mm Zerodur planar and spherical samples are made, and the final surface errors are both smaller than λ / 100 measured by a Zygo GPI interferometer.

© 2011 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: April 29, 2011
Manuscript Accepted: June 24, 2011
Published: September 13, 2011

Citation
Xuhui Xie, Lin Zhou, Yifan Dai, and Shengyi Li, "Ion beam machining error control and correction for small scale optics," Appl. Opt. 50, 5221-5227 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-27-5221

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited