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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 27 — Sep. 20, 2011
  • pp: 5221–5227

Ion beam machining error control and correction for small scale optics

Xuhui Xie, Lin Zhou, Yifan Dai, and Shengyi Li  »View Author Affiliations

Applied Optics, Vol. 50, Issue 27, pp. 5221-5227 (2011)

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Ion beam figuring (IBF) technology for small scale optical components is discussed. Since the small removal function can be obtained in IBF, it makes computer-controlled optical surfacing technology possible to machine precision centimeter- or millimeter-scale optical components deterministically. Using a small ion beam to machine small optical components, there are some key problems, such as small ion beam positioning on the optical surface, material removal rate, ion beam scanning pitch control on the optical surface, and so on, that must be seriously considered. The main reasons for the problems are that it is more sensitive to the above problems than a big ion beam because of its small beam diameter and lower material ratio. In this paper, we discuss these problems and their influences in machining small optical components in detail. Based on the identification–compensation principle, an iterative machining compensation method is deduced for correcting the positioning error of an ion beam with the material removal rate estimated by a selected optimal scanning pitch. Experiments on ϕ 10 mm Zerodur planar and spherical samples are made, and the final surface errors are both smaller than λ / 100 measured by a Zygo GPI interferometer.

© 2011 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing

ToC Category:
Optical Design and Fabrication

Original Manuscript: April 29, 2011
Manuscript Accepted: June 24, 2011
Published: September 13, 2011

Xuhui Xie, Lin Zhou, Yifan Dai, and Shengyi Li, "Ion beam machining error control and correction for small scale optics," Appl. Opt. 50, 5221-5227 (2011)

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  1. S. C. Fawcett, “Development of an ion beam figuring system for centimeter scale optical components,” Proc. SPIE 2263, 164–167 (1994). [CrossRef]
  2. P. M. Shanbhag, M. R. Feinberg, G. Sandri, M. N. Horenstein, and T. G. Bifano, “Ion-beam machining of millimeter scale optics,” Appl. Opt. 39, 599–611 (2000). [CrossRef]
  3. T. Franz and T. Hänsel, “Ion beam figuring (IBF) solutions for the correction of surface errors of small high performance optics,” in Optical Fabrication and Testing, OSA Technical Digest (Optical Society of America, 2008), paper OThC7.
  4. X. Xie, W. Gu, and L. Zhou, “Study on machining small precision optical component using thin ion beam,” Guofang Keji Daxue Xuebao [Journal of National University of Defense Technology 31, 10–14(2009), in Chinese.

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