We demonstrate here the fabrication of a smooth mirror surface by bending a thin silicon plate. A spherical surface is achieved by the bending moment generated in the circumference of the micromirror. Both convex and concave spherical micromirrors are realized through the anodic bonding of silicon and Pyrex glass. Since the mirror surface is originated from the polished silicon surface and no additional etching is introduced for manufacturing, the surface roughness is thus limited to the polishing error. This novel approach opens possibilities for fabricating a smooth surface for micromirror and microlens applications.
© 2011 Optical Society of America
Original Manuscript: November 19, 2010
Revised Manuscript: July 29, 2011
Manuscript Accepted: August 1, 2011
Published: September 16, 2011
Tong Wu and Kazuhiro Hane, "Fabrication of a high-precision spherical micromirror by bending a silicon plate with a metal pad," Appl. Opt. 50, 5321-5328 (2011)