OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 3 — Jan. 20, 2011
  • pp: 323–328

Radiation thermometry of silicon wafers based on emissivity-invariant condition

Tohru Iuchi and Tomohiro Seo  »View Author Affiliations


Applied Optics, Vol. 50, Issue 3, pp. 323-328 (2011)
http://dx.doi.org/10.1364/AO.50.000323


View Full Text Article

Enhanced HTML    Acrobat PDF (604 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

An emissivity-invariant condition for a silicon wafer was determined by simulation modeling and it was confirmed experimentally. The p-polarized spectral emissivity at a wavelength of 900 nm and at temperatures over 900 K was constant at 0.83 at an angle of about 55.4 ° irrespective of large variations in the oxide layer thickness and the resistivity due to the different impurity doping concentrations of the silicon wafer. The expanded uncertainty, U c = k u c ( k = 2 ), of the temperature measurement is estimated to be 4.9 K . This result is expected to significantly enhance the accuracy of radiometric temperature measurements of silicon wafers in actual manufacturing processes.

© 2011 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5630) Instrumentation, measurement, and metrology : Radiometry
(120.6780) Instrumentation, measurement, and metrology : Temperature
(160.6000) Materials : Semiconductor materials
(310.0310) Thin films : Thin films
(280.6780) Remote sensing and sensors : Temperature

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: September 16, 2010
Revised Manuscript: November 27, 2010
Manuscript Accepted: December 2, 2010
Published: January 14, 2011

Citation
Tohru Iuchi and Tomohiro Seo, "Radiation thermometry of silicon wafers based on emissivity-invariant condition," Appl. Opt. 50, 323-328 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-3-323

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited