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Effects of manufacturing errors on diffraction efficiency for multilayer diffractive optical elements |
Applied Optics, Vol. 50, Issue 32, pp. 6128-6133 (2011)
http://dx.doi.org/10.1364/AO.50.006128
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Abstract
The effect of manufacturing errors on diffraction efficiency for multilayer diffractive optical elements (MLDOEs) used in imaging optical systems is discussed in this paper. The relationship of diffraction efficiency and depth-scaling errors are analyzed for two different cases: the two relative depth-scaling errors change in the same sign and in the opposite sign. For the first condition, the corresponding diffraction efficiency decreases more slowly. The effect of periodic width errors on diffraction efficiency is also evaluated. When the two major manufacturing errors coexist, the magnitude of the decrease of diffraction efficiency is analyzed for MLDOEs. The result can be used for analyzing the effects of the manufacturing errors on diffraction efficiency for MLDOEs.
© 2011 Optical Society of America
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(050.1965) Diffraction and gratings : Diffractive lenses
ToC Category:
Diffractive Optics
History
Original Manuscript: August 3, 2011
Revised Manuscript: September 8, 2011
Manuscript Accepted: September 8, 2011
Published: November 8, 2011
Citation
Liangliang Yang, Qingfeng Cui, Tao Liu, and Changxi Xue, "Effects of manufacturing errors on diffraction efficiency for multilayer diffractive optical elements," Appl. Opt. 50, 6128-6133 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-32-6128
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