Abstract

The effect of manufacturing errors on diffraction efficiency for multilayer diffractive optical elements (MLDOEs) used in imaging optical systems is discussed in this paper. The relationship of diffraction efficiency and depth-scaling errors are analyzed for two different cases: the two relative depth-scaling errors change in the same sign and in the opposite sign. For the first condition, the corresponding diffraction efficiency decreases more slowly. The effect of periodic width errors on diffraction efficiency is also evaluated. When the two major manufacturing errors coexist, the magnitude of the decrease of diffraction efficiency is analyzed for MLDOEs. The result can be used for analyzing the effects of the manufacturing errors on diffraction efficiency for MLDOEs.

© 2011 Optical Society of America

Optimal design of depth-scaling error for multilayer diffractive optical elements with oblique incidence

Liangliang Yang, Chenglin Liu, and Shengqiang Li
Appl. Opt. 56(15) 4532-4536 (2017)

Tolerance analysis of multilayer diffractive optics based on polychromatic integral diffraction efficiency

Shan Mao, Qingfeng Cui, and Mingxu Piao
Appl. Opt. 54(32) 9528-9532 (2015)

Effect of assembling errors on the diffraction efficiency for multilayer diffractive optical elements

Long Gao, Suet To, Hongfang Yang, Xin Nie, Tianchen Liu, and Changxi Xue
Appl. Opt. 53(31) 7341-7347 (2014)

Sensitivity of diffraction efficiency to period width errors for multilayer diffractive optical elements

Hongfang Yang and Changxi Xue
Appl. Opt. 57(4) 855-860 (2018)

Tolerance analysis on decenter error of multilayer diffractive optical elements based on polychromatic integral diffraction efficiency

Shan Mao and Jianlin Zhao
Appl. Opt. 58(9) 2422-2428 (2019)