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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 33 — Nov. 20, 2011
  • pp: 6153–6161

Optics InfoBase > Applied Optics > Volume 50 > Issue 33 > Page 6153

Two-wavelength in-line phase-shifting interferometry based on polarizing separation for accurate surface profiling

D. G. Abdelsalam and Daesuk Kim  »View Author Affiliations


Applied Optics, Vol. 50, Issue 33, pp. 6153-6161 (2011)
http://dx.doi.org/10.1364/AO.50.006153


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Abstract

We describe a configuration that can be used for two-wavelength phase-shifting in-line interferometry based on polarizing separation. The experiment is conducted on a sample with a step height of 1.34   μm nominally. In this paper, five- and seven-phase step algorithms have been compared for their effectiveness in reducing the noise in the phase maps. The noise is further reduced by the application of the flat fielding method. The recorded interferograms are processed using seven-phase step algorithm to obtain the phase map for each wavelength separately. The independent phase maps are subtracted and a phase map for the beat-wavelength is obtained and converted to height map. The results extracted from the seven-phase step algorithm have been compared with the results extracted from the single shot off-axis geometry and the results are in agreement.

© 2011 Optical Society of America

OCIS Codes
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(180.6900) Microscopy : Three-dimensional microscopy
(090.1995) Holography : Digital holography
(110.6955) Imaging systems : Tomographic imaging

ToC Category:
Holography

History
Original Manuscript: August 17, 2011
Revised Manuscript: October 6, 2011
Manuscript Accepted: October 6, 2011
Published: November 10, 2011

Virtual Issues
Vol. 7, Iss. 1 Virtual Journal for Biomedical Optics

Citation
D. G. Abdelsalam and Daesuk Kim, "Two-wavelength in-line phase-shifting interferometry based on polarizing separation for accurate surface profiling," Appl. Opt. 50, 6153-6161 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-33-6153

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