OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 33 — Nov. 20, 2011
  • pp: 6189–6197

Comparison of two techniques for reliable characterization of thin metal–dielectric films

Tatiana V. Amotchkina, Michael K. Trubetskov, Alexander V. Tikhonravov, Vesna Janicki, Jordi Sancho-Parramon, and Hrvoje Zorc  »View Author Affiliations

Applied Optics, Vol. 50, Issue 33, pp. 6189-6197 (2011)

View Full Text Article

Enhanced HTML    Acrobat PDF (487 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



In the present study we determine the optical parameters of thin metal–dielectric films using two different characterization techniques based on nonparametric and multiple oscillator models. We consider four series of thin metal–dielectric films produced under various deposition conditions with different optical properties. We compare characterization results obtained by nonparametric and multiple oscillator techniques and demonstrate that the results are consistent. The consistency of the results proves their reliability.

© 2011 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(310.3915) Thin films : Metallic, opaque, and absorbing coatings

ToC Category:
Thin Films

Original Manuscript: July 28, 2011
Revised Manuscript: October 3, 2011
Manuscript Accepted: October 3, 2011
Published: November 15, 2011

Tatiana V. Amotchkina, Michael K. Trubetskov, Alexander V. Tikhonravov, Vesna Janicki, Jordi Sancho-Parramon, and Hrvoje Zorc, "Comparison of two techniques for reliable characterization of thin metal–dielectric films," Appl. Opt. 50, 6189-6197 (2011)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. A. Leitner, Z. Zhao, H. Brunner, F. Aussenegg, and A. Wokaun, “Optical properties of a metal island film close to a smooth metal surface,” Appl. Opt. 32, 102–110 (1993). [CrossRef] [PubMed]
  2. O. Stenzel, A. Stendal, M. R. Röder, S. Wilbrandt, D. Drews, T. Werninghaus, C. von Borczyskowski, and D. R. T. Zahn, “Localized plasmon excitation in metal nanoclusters as a tool to study thickness-dependent optical properties of copper phthalocyanine ultrathin films,” Nanotechnology 9, 6–19(1998). [CrossRef]
  3. O. Stenzel, A. Stendal, M. Röder, and C. von Borczyskowski, “Tuning of the plasmon absorption frequency of silver and indium nanoclusters via thin amorphous silicon films,” Pure Appl. Opt. 6, 577–588 (1997). [CrossRef]
  4. A. Stepanov, “Optical transmission of dielectric layers with metallic nanoparticles inhomogeneously distributed over the sample thickness,” Opt. Spectrosc. 91, 815–819 (2001). [CrossRef]
  5. N. Kaiser, “Review of the fundamentals of thin-film growth,” Appl. Opt. 41, 3053–3060 (2002). [CrossRef] [PubMed]
  6. P. Heger, O. Stenzel, and N. Kaiser, “Design and fabrication of selective thin film absorbers on the basis of silver island films,” Vacuum’s Best VIP 18, 53–56 (2006). [CrossRef]
  7. A. de Vries, E. Kooij, H. Wormeester, A. Mewe, and B. Poelsema, “Ellipsometric study of percolation in electroless deposited silver films,” J. Appl. Phys. 101, 053703 (2007). [CrossRef]
  8. A. Lehmuskero, M. Kuittinen, and P. Vahimaa, “Refractive index and extinction coefficient dependence of thin Al and Ir films on deposition technique and thickness,” Opt. Express 15, 10744–10752 (2007). [CrossRef] [PubMed]
  9. T. Iwata and G. Komoda, “Measurement of complex refractive indices of metals at several wavelengths by frustrated total internal reflection due to surface plasmon resonance,” Appl. Opt. 47, 2386–2391 (2008). [CrossRef] [PubMed]
  10. I. Hooper and J. Sambles, “Some considerations on the transmissivity of thin metal films,” Opt. Express 16, 17249–17257(2008). [CrossRef] [PubMed]
  11. Y. Jourlin, S. Tonchev, T. Tishchenko, C. Pedri, C. Veillas, O. Parriaux, A. Last, and Y. Lacroute, “Spatially and polarization resolved plasmon mediated transmission through continuous metal films,” Opt. Express 17, 12155–12160 (2009). [CrossRef] [PubMed]
  12. M. Hövel, B. Gompf, and M. Dressel, “Dielectric properties of ultrathin metal films around the percolation threshold,” Phys. Rev. B 81, 035402 (2010). [CrossRef]
  13. A. Nabok and S. A. Tsargorodskaya, “Ellipsometry study of ultra thin layers of evaporated gold,” Phys. Status Solidi C 5, 1150–1155 (2008). [CrossRef]
  14. W. Chen, M. Thoreson, S. Ishii, A. Kildishev, and V. Shalaev, “Ultra-thin ultra-smooth and low-loss silver films on a germanium wetting layer,” Opt. Express 18, 5124–5134 (2010). [CrossRef] [PubMed]
  15. H. Zorc, M. Lončarić, J. Sancho-Parramon, and V. Janicki, “Use of gold island films in design of reflectors with luminosity,” in Optical Interference Coatings on CD-ROM (Optical Society of America, 2010), paper TuD8.
  16. T. Amotchkina, V. Janicki, J. Sancho-Parramon, A. Tikhonravov, M. Trubetskov, and H. Zorc, “General approach to reliable characterization of thin metal films,” Appl. Opt. 50, 1453–1464(2011). [CrossRef] [PubMed]
  17. J. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, “2007 OSA Topical Meeting on Optical Interference Coatings: manufacturing problem,” Appl. Opt. 47, C231–C245(2008). [CrossRef] [PubMed]
  18. J. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, “2004 Optical Society of America’s Topical Meeting on Optical Interference Coatings: manufacturing problem,” Appl. Opt. 45, 1303–1311 (2006). [CrossRef] [PubMed]
  19. J. Dobrowolski, L. Li, and R. Kemp, “Metal/dielectric transmission interference filters with low reflectance. 1. design,” Appl. Opt. 34, 5673–5683 (1995). [CrossRef] [PubMed]
  20. N. Kaiser, “Some fundamentals of optical thin film growth,” in Optical Interference Coatings, N.Kaiser and H.K.Pulker, eds. (Springer-Verlag, 2003), pp. 59–80.
  21. P. Ma, F. Lin, and J. Dobrowolski, “Design and manufacture of metal–dielectric long wavelength cut-off filters,” in Optical Interference Coatings on CD-ROM, OSA Technical Digest Series (Optical Society of America, 2010), paper MA9.
  22. U. Kreibig and M. Vollmer, Optical Properties of Metal Clusters (Springer, 1995).
  23. O. Stenzel, S. Wilbrandt, A. Stendal, U. Beckers, K. Voigtsberger, and C. von Borczyskowski, “The incorporation of metal clusters into thin organic dye layers as a method for producing strongly absorbing composite layers: an oscillator model approach to resonant metal cluster absorption,” J. Phys. D 28, 2154–2162(1995). [CrossRef]
  24. A. B. Djurisic, T. Fritz, and K. Leo, “Modelling the optical constants of organic thin films: impact of the choice of objective function,” J. Opt. A 2, 458–464 (2000). [CrossRef]
  25. J. Sancho-Parramon, V. Janicki, and H. Zorc, “Tuning the effective dielectric function of thin film metal–dielectric composites by controlling the deposition temperature,” J. Nanophoton. 5, 051805 (2011). [CrossRef]
  26. E. D. Palik, Handbook of Optical Constants of Solids(Academic, 1985).
  27. O. Stenzel, The Physics of Thin Film Optical Spectra(Springer-Verlag, 2005).
  28. P. Johnson and R. Christy, “Optical constants of the noble metals,” Phys. Rev. B 6, 4370–4379 (1972). [CrossRef]
  29. J. Bulir, M. Novotny, A. Lynnykova, and J. Lancok, “Preparation of nanostructured ultrathin silver layer,” J. Nanophoton. 5, 051511 (2011). [CrossRef]
  30. O. Stenzel and R. Petrich, “Flexible construction of error functions and their minimization: application to the calculation of optical constants of absorbing or scattering thin-film materials from spectrophotometric data,” J. Phys. D 28, 978–989 (1995). [CrossRef]
  31. A. V. Tikhonravov, M. K. Trubetskov, J. Hrdina, and J. Sobota, “Characterization of quasi-rugate filters using ellipsometric measurements,” Thin Solid Films 277, 83–89 (1996). [CrossRef]
  32. A. V. Tikhonravov, M. K. Trubetskov, O. F. Prosovskiy, and M. A. Kokarev, “Optical characterization of thin metal films,” in Optical Interference Coatings (Optical Society of America, 2007), paper WDPDP2.
  33. A. Tikhonravov, M. Trubetskov, T. Amotchkina, M. Kokarev, I. Kozlov, V. Zhupanov, E. Kluev, and O. Prosovskiy, “Optical coatings containing well-controlled few nanometer thick metal layers,” in Nanofair 2008. New Ideas for Industry (WDI Wissensforum GmbH, 2008), pp. 171–174.
  34. H. Fujuwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, 2007).
  35. A. V. Tikhonravov and M. K. Trubetskov, OptiLayer thin film software, http://www.optilayer.com.
  36. M. Lončarić, J. Sancho-Parramon, and H. Zorc, “Optical properties of gold islands films—a spectroscopic ellipsometry study,” Thin Solid Films 519, 2946–2950 (2011). [CrossRef]
  37. A. Franke, A. Stendal, O. Stenzel, and C. von Borczyskowski, “Gaussian quadrature approach to the calculation of the optical constants in the vicinity of inhomogeneously broadened absorption lines,” Pure Appl. Opt. 5, 845–853 (1996). [CrossRef]
  38. J. Woollam, WVASE Manual: Guide to Using WVASE32(WexTech Systems, Inc., 1996).
  39. J. Sancho-Parramon, V. Janicki, and H. Zorc, “On the dielectric function tuning of random metal–dielectric nanocomposites for metamaterial applications,” Opt. Express 18, 26915–26928(2010). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited