|
Phase-conjugate holographic lithography based on micromirror array recording |
Applied Optics, Vol. 50, Issue 34, pp. H68-H74 (2011)
http://dx.doi.org/10.1364/AO.50.000H68
Enhanced HTML 
Acrobat PDF (674 KB)
Abstract
We present phase-conjugate holographic lithography with a hologram recorded by a digital micromirror device (DMD) and a telecentric lens. In our lithography system, a phase-conjugate hologram is applied instead of conventional masks or reticles to form patterns. This method has the advantage of increasing focus range, and it is applicable to the formation of patterns on fairly uneven surfaces. The hologram pattern is dynamically generated by the DMD, and its resolution is mainly determined by the demagnification of the telecentric lens. We experimentally demonstrate that our holographic lithographic system has a large focus range, and it is feasible to make a large-area hologram by stitching each pattern generated by the DMD without a falling off in resolution.
© 2011 Optical Society of America
OCIS Codes
(090.7330) Holography : Volume gratings
(220.3740) Optical design and fabrication : Lithography
(090.1995) Holography : Digital holography
ToC Category:
Optimization, Improvement, Enhancement, and Coding in Digital
Holography
History
Original Manuscript: August 1, 2011
Revised Manuscript: September 30, 2011
Manuscript Accepted: October 13, 2011
Published: November 10, 2011
Virtual Issues
Digital Holography and 3D Imaging 2011 (2011) Applied Optics
Citation
Yongjun Lim, Joonku Hahn, and Byoungho Lee, "Phase-conjugate holographic lithography based on micromirror array recording," Appl. Opt. 50, H68-H74 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-34-H68
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Diffractive lens fabricated with binary features less than 60 nm (OL)
- Diffraction properties of highly birefringent liquid-crystal composite gratings (OL)
- Contrast in the Evanescent Near Field of λ/20 Period Gratings for Photolithography (AO)
- Single-shot holography for depth resolved three dimensional imaging (OE)
- Light induced patterning of poly(dimethylsiloxane) microstructures (OE)
Related Conference Papers
- Rigorous Analysis of Strong Spherical Wave Gratings Using a Slice-and-Cascade Approach
- Numercal Simulation of Hyper-Spectral Volume Holographic Imaging Using Slice-and-Cascade Method
- High Performance Holographic Data Storage
- Improvement on Recording Density in Reflection-Type Holographic Memory with Random Phase Shift Multiplexing
- Single-shot full field imaging in a dual-wavelength digital holographic microscope
« Previous Article | Next Article »
OSA is a member of 