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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 4 — Feb. 1, 2011
  • pp: 460–467

Phase-locked loop based on machine surface topography measurement using lensed fibers

Jin-Ho Kang, ChaBum Lee, Jae-Young Joo, and Sun-Kyu Lee  »View Author Affiliations

Applied Optics, Vol. 50, Issue 4, pp. 460-467 (2011)

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We present the phase-locked loop (PLL)-based metrology concept using lensed fibers for on-machine surface topography measurement. The shape of a single-mode fiber at the endface was designed using an ABCD matrix method, and two designed lensed fibers—the ball type and the tapered type—were fabricated, and the performance was evaluated, respectively. As a result, the interferometric fringe was not found in the case of the ball lensed fiber, but the machined surface could be measured by utilization of autofocusing and intensity methods. On the other hand, a very clear Fizeau interferometric fringe was observed in the case of the tapered lensed fiber. Its performance was compared with the results of the capacitance sensor and a commercially available white-light interferometer. We confirmed that PLL-based surface profile measurement using the tapered and ball lensed fibers can be applied for on-machine surface topography measurement applications.

© 2011 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 31, 2010
Revised Manuscript: November 29, 2010
Manuscript Accepted: December 6, 2010
Published: January 26, 2011

Jin-Ho Kang, ChaBum Lee, Jae-Young Joo, and Sun-Kyu Lee, "Phase-locked loop based on machine surface topography measurement using lensed fibers," Appl. Opt. 50, 460-467 (2011)

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