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Diffractive simultaneous bidirectional shearing interferometry using tailored spatially coherent light |
Applied Optics, Vol. 50, Issue 4, pp. 571-578 (2011)
http://dx.doi.org/10.1364/AO.50.000571
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Abstract
Measurements of wavefront deformations can be carried out with the help of lateral shearing interferometers. Here the focus is on a setup providing two shears along orthogonal directions simultaneously to generate the data needed for a reconstruction. We describe a diffractive solution using Ronchi phase gratings with a suppressed zeroth order for both the doubling of the wavefront under test and the bidirectional shearing unit. A series arrangement of the gratings offers an on-axis geometry, which minimizes the systematic errors of the test. For illumination, an extended incoherent monochromatic light source is used. High-contrast fringes can be obtained by tailoring the degree of coherence via a periodic intensity distribution.
© 2011 Optical Society of America
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(260.0260) Physical optics : Physical optics
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: July 23, 2010
Revised Manuscript: November 5, 2010
Manuscript Accepted: December 17, 2010
Published: January 31, 2011
Citation
Vanusch Nercissian, Irina Harder, Klaus Mantel, Andreas Berger, Gerd Leuchs, Norbert Lindlein, and Johannes Schwider, "Diffractive simultaneous bidirectional shearing interferometry using tailored spatially coherent light," Appl. Opt. 50, 571-578 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-4-571
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