The application of a single cube beam splitter (SCBS) microscope to micro-optics characterization is presented. The SCBS in the optical path, with a small angle between the optical axis and its central semireflecting layer, not only gives off-axis digital holograms but also provides dual-channel imaging. It is a unique and easy way to perform uniformity inspection across the entire microlens array. Experimental results on physical spherical phase compensation, single lens characterization, dual-channel imaging, and uniformity inspection are provided to demonstrate the unique properties of SCBS microscopy.
© 2011 Optical Society of America
Original Manuscript: August 17, 2010
Revised Manuscript: November 19, 2010
Manuscript Accepted: January 5, 2011
Published: February 16, 2011
Vol. 6, Iss. 3 Virtual Journal for Biomedical Optics
Weijuan Qu, Oi Choo Chee, Yingjie Yu, and Anand Asundi, "Characterization and inspection of microlens array by single cube beam splitter microscopy," Appl. Opt. 50, 886-890 (2011)