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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 6 — Feb. 20, 2011
  • pp: 962–969

Discontinuous surface measurement by wavelength-tuning interferometry with the excess fraction method correcting scanning nonlinearity

Kenichi Hibino, Yosuke Tani, Youichi Bitou, Toshiyuki Takatsuji, Shinichi Warisawa, and Mamoru Mitsuishi  »View Author Affiliations

Applied Optics, Vol. 50, Issue 6, pp. 962-969 (2011)

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Wavelength-tuning interferometry can measure surface shapes with discontinuous steps using a unit of synthetic wavelength that is usually larger than the step height. However, measurement resolution decreases for large step heights since the synthetic wavelength becomes much larger than the source wavelength. The excess fraction method with a piezoelectric transducer phase shifting is applied to two-dimensional surface shape measurements. Systematic errors caused by nonlinearity in source frequency scanning are fully corrected by a correlation analysis between the observed and calculated interference fringes. Experiment results demonstrate that the determination of absolute interference order gives the profile of a surface with a step height of 1 mm with an accuracy of 12 nm .

© 2011 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: October 15, 2010
Revised Manuscript: December 16, 2010
Manuscript Accepted: January 7, 2011
Published: February 17, 2011

Kenichi Hibino, Yosuke Tani, Youichi Bitou, Toshiyuki Takatsuji, Shinichi Warisawa, and Mamoru Mitsuishi, "Discontinuous surface measurement by wavelength-tuning interferometry with the excess fraction method correcting scanning nonlinearity," Appl. Opt. 50, 962-969 (2011)

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