Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Discontinuous surface measurement by wavelength-tuning interferometry with the excess fraction method correcting scanning nonlinearity

Not Accessible

Your library or personal account may give you access

Abstract

Wavelength-tuning interferometry can measure surface shapes with discontinuous steps using a unit of synthetic wavelength that is usually larger than the step height. However, measurement resolution decreases for large step heights since the synthetic wavelength becomes much larger than the source wavelength. The excess fraction method with a piezoelectric transducer phase shifting is applied to two-dimensional surface shape measurements. Systematic errors caused by nonlinearity in source frequency scanning are fully corrected by a correlation analysis between the observed and calculated interference fringes. Experiment results demonstrate that the determination of absolute interference order gives the profile of a surface with a step height of 1mm with an accuracy of 12nm.

© 2011 Optical Society of America

Full Article  |  PDF Article
More Like This
Absolute optical thickness measurement of transparent plate using excess fraction method and wavelength-tuning Fizeau interferometer

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, and Mamoru Mitsuishi
Opt. Express 23(4) 4065-4073 (2015)

Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer

Kenichi Hibino, Bozenko F. Oreb, Philip S. Fairman, and Jan Burke
Appl. Opt. 43(6) 1241-1249 (2004)

Method of excess fractions with application to absolute distance metrology: theoretical analysis

Konstantinos Falaggis, David P. Towers, and Catherine E. Towers
Appl. Opt. 50(28) 5484-5498 (2011)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (17)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved