A rigorous definition of the error self-compensation effect is provided. An existence of this effect in the case of coating production with broadband optical monitoring of layer thicknesses is investigated for several widely used types of optical coatings.
© 2011 Optical Society of America
Original Manuscript: July 21, 2010
Manuscript Accepted: August 23, 2010
Published: November 11, 2010
Alexander V. Tikhonravov, Michael K. Trubetskov, and Tatiana V. Amotchkina, "Investigation of the error self-compensation effect associated with broadband optical monitoring," Appl. Opt. 50, C111-C116 (2011)