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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 9 — Mar. 20, 2011
  • pp: C135–C140

Control of stress in protected silver mirrors prepared by plasma beam sputtering

James D. Barrie, Peter D. Fuqua, Kelsey A. Folgner, and Chung-Tse Chu  »View Author Affiliations

Applied Optics, Vol. 50, Issue 9, pp. C135-C140 (2011)

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Plasma beam sputtering was used to deposit dielectric-protected silver mirrors that exhibited excellent durability and controlled stress. The durability of the mirrors was strongly dependent upon the presence of a very thin chromium adhesion layer between the silver layer and the dielectric overcoat. The stress of the five-layer mirror was balanced by controlling the compressive stress in the top dielectric layer, offsetting the net tensile stress of the combination of layers below.

© 2011 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

Original Manuscript: August 2, 2010
Manuscript Accepted: October 18, 2010
Published: November 24, 2010

James D. Barrie, Peter D. Fuqua, Kelsey A. Folgner, and Chung-Tse Chu, "Control of stress in protected silver mirrors prepared by plasma beam sputtering," Appl. Opt. 50, C135-C140 (2011)

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