Plasma beam sputtering was used to deposit dielectric-protected silver mirrors that exhibited excellent durability and controlled stress. The durability of the mirrors was strongly dependent upon the presence of a very thin chromium adhesion layer between the silver layer and the dielectric overcoat. The stress of the five-layer mirror was balanced by controlling the compressive stress in the top dielectric layer, offsetting the net tensile stress of the combination of layers below.
© 2011 Optical Society of America
Original Manuscript: August 2, 2010
Manuscript Accepted: October 18, 2010
Published: November 24, 2010
James D. Barrie, Peter D. Fuqua, Kelsey A. Folgner, and Chung-Tse Chu, "Control of stress in protected silver mirrors prepared by plasma beam sputtering," Appl. Opt. 50, C135-C140 (2011)