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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 9 — Mar. 20, 2011
  • pp: C159–C163

Thermal expansion coefficients of obliquely deposited MgF 2 thin films and their intrinsic stress

Cheng-Chung Jaing  »View Author Affiliations


Applied Optics, Vol. 50, Issue 9, pp. C159-C163 (2011)
http://dx.doi.org/10.1364/AO.50.00C159


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Abstract

This study elucidates the effects of columnar angles and deposition angles on the thermal expansion coefficients and intrinsic stress behaviors of MgF 2 films with columnar microstructures. The behaviors associated with temperature-dependent stresses in the MgF 2 films are measured using a phase-shifting Twyman–Green interferometer with a heating stage and the application of a phase reduction algorithm. The thermal expansion coefficients of MgF 2 films at various columnar angles were larger than those of glass substrates. The intrinsic stress in the MgF 2 films with columnar microstructures was compressive, while the thermal stress was tensile. The thermal expansion coefficients of MgF 2 films with columnar microstructures and their intrinsic stress evidently depended on the deposition angle and the columnar angle.

© 2011 Optical Society of America

OCIS Codes
(310.3840) Thin films : Materials and process characterization
(310.4925) Thin films : Other properties (stress, chemical, etc.)
(310.6628) Thin films : Subwavelength structures, nanostructures

History
Original Manuscript: August 2, 2010
Revised Manuscript: October 24, 2010
Manuscript Accepted: October 29, 2010
Published: December 2, 2010

Citation
Cheng-Chung Jaing, "Thermal expansion coefficients of obliquely deposited MgF2 thin films and their intrinsic stress," Appl. Opt. 50, C159-C163 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-9-C159

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