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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 9 — Mar. 20, 2011
  • pp: C164–C171

Angle-resolved scattering: an effective method for characterizing thin-film coatings

Sven Schröder, Tobias Herffurth, Holger Blaschke, and Angela Duparré  »View Author Affiliations

Applied Optics, Vol. 50, Issue 9, pp. C164-C171 (2011)

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Light scattered from interface imperfections carries valuable information about its origins. For single surfaces, light-scattering techniques have become a powerful tool for the characterization of surface roughness. For thin-film coatings, however, solving the inverse scattering problem seemed to be impossible because of the large number of parameters involved. A simplified model is presented that introduces two parameters: Parameter δ describes optical thickness deviations from the perfect design, and param eter β describes the roughness evolution inside the coating according to a power law. The new method is used to investigate structural and alteration effects of HR coatings for 193 nm , as well as laser-induced degradation effects in Rugate filters for 355 nm .

© 2011 Optical Society of America

OCIS Codes
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.3330) Lasers and laser optics : Laser damage
(240.5770) Optics at surfaces : Roughness
(290.0290) Scattering : Scattering
(310.0310) Thin films : Thin films

Original Manuscript: July 29, 2010
Revised Manuscript: October 20, 2010
Manuscript Accepted: October 22, 2010
Published: December 2, 2010

Sven Schröder, Tobias Herffurth, Holger Blaschke, and Angela Duparré, "Angle-resolved scattering: an effective method for characterizing thin-film coatings," Appl. Opt. 50, C164-C171 (2011)

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  1. S. Schröder and A. Duparré, “Finish assessment of complex surfaces by advanced light scattering techniques,” Proc. SPIE 7102, 71020F (2008).
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