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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 9 — Mar. 20, 2011
  • pp: C19–C26

Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

James B. Oliver, Pete Kupinski, Amy L. Rigatti, Ansgar W. Schmid, John C. Lambropoulos, Semyon Papernov, Alexei Kozlov, John Spaulding, Daniel Sadowski, Z. Roman Chrzan, Robert D. Hand, Desmond R. Gibson, Ian Brinkley, and Frank Placido  »View Author Affiliations

Applied Optics, Vol. 50, Issue 9, pp. C19-C26 (2011)

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Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1 m in aperture.

© 2011 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.4925) Thin films : Other properties (stress, chemical, etc.)

Original Manuscript: July 30, 2010
Manuscript Accepted: August 19, 2010
Published: October 8, 2010

James B. Oliver, Pete Kupinski, Amy L. Rigatti, Ansgar W. Schmid, John C. Lambropoulos, Semyon Papernov, Alexei Kozlov, John Spaulding, Daniel Sadowski, Z. Roman Chrzan, Robert D. Hand, Desmond R. Gibson, Ian Brinkley, and Frank Placido, "Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings," Appl. Opt. 50, C19-C26 (2011)

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